Surfaces and Interfaces, volume 62, pages 106135
TiN/HZO/TiN ferroelectric capacitors with TiO2 insets: critical difference between top and bottom interface modification
Publication type: Journal Article
Publication date: 2025-04-01
Journal:
Surfaces and Interfaces
scimago Q1
SJR: 0.940
CiteScore: 8.5
Impact factor: 5.7
ISSN: 24680230
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Chernikova A. G. et al. TiN/HZO/TiN ferroelectric capacitors with TiO2 insets: critical difference between top and bottom interface modification // Surfaces and Interfaces. 2025. Vol. 62. p. 106135.
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Chernikova A. G., Sizykh N. A., Zabrosaev I. V., Markeev A. M. TiN/HZO/TiN ferroelectric capacitors with TiO2 insets: critical difference between top and bottom interface modification // Surfaces and Interfaces. 2025. Vol. 62. p. 106135.
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TY - JOUR
DO - 10.1016/j.surfin.2025.106135
UR - https://linkinghub.elsevier.com/retrieve/pii/S2468023025003943
TI - TiN/HZO/TiN ferroelectric capacitors with TiO2 insets: critical difference between top and bottom interface modification
T2 - Surfaces and Interfaces
AU - Chernikova, Anna G.
AU - Sizykh, Nikita A.
AU - Zabrosaev, Ivan V.
AU - Markeev, Andrey M.
PY - 2025
DA - 2025/04/01
PB - Elsevier
SP - 106135
VL - 62
SN - 2468-0230
ER -
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@article{2025_Chernikova,
author = {Anna G. Chernikova and Nikita A. Sizykh and Ivan V. Zabrosaev and Andrey M. Markeev},
title = {TiN/HZO/TiN ferroelectric capacitors with TiO2 insets: critical difference between top and bottom interface modification},
journal = {Surfaces and Interfaces},
year = {2025},
volume = {62},
publisher = {Elsevier},
month = {apr},
url = {https://linkinghub.elsevier.com/retrieve/pii/S2468023025003943},
pages = {106135},
doi = {10.1016/j.surfin.2025.106135}
}