Surface and Coatings Technology, volume 432, pages 128051

Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering

Sviridova Elizaveta 1
Touaibia Djallel Eddine 1, 2
Achache Sofiane 1, 2
Schuster Frederic 3
Michau Alexandre 3
Sanchette Frederic 1, 2
1
 
LASMIS, Antenne de Nogent – 52, Pôle Technologique de Sud – Champagne, 52800 Nogent, France
2
 
Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud Champagne, 52800 Nogent, France
3
 
Commissariat à l'Energie Atomique et aux énergies alternatives (CEA) Saclay, 91191 Gif-sur Yvette, France
5
 
Université de Paris, ITODYS, UMR CNRS 7086, 15 rue JA de Baïf, 75013 Paris, France
Publication typeJournal Article
Publication date2022-02-01
Quartile SCImago
Q1
Quartile WOS
Q1
Impact factor5.4
ISSN02578972
Materials Chemistry
Surfaces, Coatings and Films
General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Abstract
There is a growing interest in the design of high entropy alloys due to their remarkable properties and applications in various fields such as aerospace, medical and automotive. AlTiTaZrHf(-N) high entropy metal-sublattice nitrides were deposited in various argon‑nitrogen gas mixtures on glass and silicon substrates. X-ray diffraction analyses reveal a transition from amorphous to an FCC single phase by increasing the nitrogen content. The films have compact or columnar morphology depending on the nitrogen flow rate. Energy dispersive spectroscopy analysis shows a decreasing of the matals content as the nitrogen flow rates ratio R N2 = N 2 /Ar + N 2 increases. XPS surface analysis reveal the formation of nitrides when the nitrogen is introduced. Evolution of hardness and Young's modulus are discussed and the maximum values are obtained for a flow rates ratio R N2 of 10% at 27.67 GPa and 205.56 GPa respectively. The same film reveals good tribological properties compared to other films. This work conclusively demonstrates that high entropy metal-sublattice nitrides can be generated in an efficient way with tunable properties. • Multicomponent AlTiTaZrHf(-N) deposited by reactive magnetron sputtering • Effect of nitrogen content on microstructure, mechanical properties and tribological performance studied • H and E are monitored by controlling the stoichiometric of N/Me.

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El Garah M. et al. Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering // Surface and Coatings Technology. 2022. Vol. 432. p. 128051.
GOST all authors (up to 50) Copy
El Garah M., Touaibia D. E., Achache S., Sviridova E., Schuster F., Michau A., Postnikov P. S., Chehimi M. M., Sanchette F. Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering // Surface and Coatings Technology. 2022. Vol. 432. p. 128051.
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RIS Copy
TY - JOUR
DO - 10.1016/j.surfcoat.2021.128051
UR - https://doi.org/10.1016%2Fj.surfcoat.2021.128051
TI - Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering
T2 - Surface and Coatings Technology
AU - El Garah, Mohamed
AU - Touaibia, Djallel Eddine
AU - Achache, Sofiane
AU - Sviridova, Elizaveta
AU - Schuster, Frederic
AU - Michau, Alexandre
AU - Postnikov, Pavel S.
AU - Chehimi, Mohamed M.
AU - Sanchette, Frederic
PY - 2022
DA - 2022/02/01 00:00:00
PB - Elsevier
SP - 128051
VL - 432
SN - 0257-8972
ER -
BibTex
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BibTex Copy
@article{2022_El Garah,
author = {Mohamed El Garah and Djallel Eddine Touaibia and Sofiane Achache and Elizaveta Sviridova and Frederic Schuster and Alexandre Michau and Pavel S. Postnikov and Mohamed M. Chehimi and Frederic Sanchette},
title = {Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering},
journal = {Surface and Coatings Technology},
year = {2022},
volume = {432},
publisher = {Elsevier},
month = {feb},
url = {https://doi.org/10.1016%2Fj.surfcoat.2021.128051},
pages = {128051},
doi = {10.1016/j.surfcoat.2021.128051}
}
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