X-Ray Spectrometry
Silicon wafer analysis by non‐monochromatic total reflection x‐ray fluorescence analysis
Dayun Liu
1
,
Jun Kawai
1
Publication type: Journal Article
Publication date: 2022-07-27
Journal:
X-Ray Spectrometry
scimago Q3
SJR: 0.270
CiteScore: 3.1
Impact factor: 1.5
ISSN: 00498246, 10974539
DOI:
10.1002/xrs.3304
Spectroscopy
Found
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