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Applied Physics A: Materials Science and Processing

, том 55 , издание 2 , страницы 196-202

Direct writing of gold lines by laser-induced chemical vapor deposition

Тип публикации: Journal Article

Дата публикации: 1992-08-01

Springer Nature

Applied Physics A: Materials Science and Processing

scimago Q2

wos Q2

white level БС2

SJR: 0.474

CiteScore: 4.9

Impact factor: 2.8

ISSN: 09478396, 14320630

DOI: 10.1007/bf00334223

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General Chemistry

General Materials Science

Physics and Astronomy (miscellaneous)

General Engineering

Краткое описание

Stripes of gold metal were deposited by focussing an Ar+ laser (514nm) onto glass substrates in a heated vacuum cell containing the evaporator and the precursor. MeAuPMe3, Me3AuPR3 (R = Me,Et) were used as precursors. Using MeAuPMe3 or Me3AuPEt3, deposits of high quality were obtained above 40° C and 60° C evaporator temperature, respectively. With Me3AuPMe3 the same deposits of gold stripes were possible near room temperature. The stripes were characterized by scanning profilometry, electrical resistivity, SEM and SAM measurements. In general, the stripe resistivity was between 1.5 and 7 times of the bulk metal.

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ГОСТ |

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Messelhuser J., Flint E. B., SUHR H. Direct writing of gold lines by laser-induced chemical vapor deposition // Applied Physics A: Materials Science and Processing. 1992. Vol. 55. No. 2. pp. 196-202.

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Messelhuser J., Flint E. B., SUHR H. Direct writing of gold lines by laser-induced chemical vapor deposition // Applied Physics A: Materials Science and Processing. 1992. Vol. 55. No. 2. pp. 196-202.

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TY - JOUR

DO - 10.1007/bf00334223

UR - https://doi.org/10.1007/bf00334223

TI - Direct writing of gold lines by laser-induced chemical vapor deposition

T2 - Applied Physics A: Materials Science and Processing

AU - Messelhuser, J

AU - Flint, E B

AU - SUHR, H.

PY - 1992

DA - 1992/08/01

PB - Springer Nature

SP - 196-202

IS - 2

VL - 55

SN - 0947-8396

SN - 1432-0630

ER -

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@article{1992_Messelhuser,

author = {J Messelhuser and E B Flint and H. SUHR},

title = {Direct writing of gold lines by laser-induced chemical vapor deposition},

journal = {Applied Physics A: Materials Science and Processing},

year = {1992},

volume = {55},

publisher = {Springer Nature},

month = {aug},

url = {https://doi.org/10.1007/bf00334223},

number = {2},

pages = {196--202},

doi = {10.1007/bf00334223}

}

MLA

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Messelhuser, J., et al. “Direct writing of gold lines by laser-induced chemical vapor deposition.” Applied Physics A: Materials Science and Processing, vol. 55, no. 2, Aug. 1992, pp. 196-202. https://doi.org/10.1007/bf00334223.

Издатель

Springer Nature

Журнал

Applied Physics A: Materials Science and Processing

scimago Q2

wos Q2

white level БС2

SJR

0.474

CiteScore

4.9

Impact factor

2.8

ISSN

09478396 (Print)

14320630 (Electronic)

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