Integrating Materials and Manufacturing Innovation

Sputter-Deposited Mo Thin Films: Characterization of Grain Structure and Monte Carlo Simulations of Sputtered Atom Energies and Incidence Angles

Joyce O. Custer
M Kalaswad
R. S. Kothari
P. G. Kotula
T. Ruggles
A. Hinojos
R Dingreville
A. Henriksen
D. P. Adams
Show full list: 9 authors
Publication typeJournal Article
Publication date2024-12-12
scimago Q1
wos Q3
SJR0.742
CiteScore5.3
Impact factor2.4
ISSN21939764, 21939772
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