Pulsed laser deposition of single phase LiNbO3 thin film waveguides
Тип публикации: Journal Article
Дата публикации: 2006-12-01
scimago Q3
wos Q2
white level БС2
SJR: 0.384
CiteScore: 3.4
Impact factor: 2.6
ISSN: 13853449, 15738663
Materials Chemistry
Ceramics and Composites
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Mechanics of Materials
Краткое описание
We performed a parametric study to suppress secondary phases in lithium niobate thin films by using pulsed laser deposition (PLD). By reducing the growth rate and changing the ambient gas pressure respectively, we found that the main parameter suppressing secondary phases is controlling the plume strength. For investigating the relation between film phases and the plume strength, extensive parametric studies were performed by changing the oxygen ambient pressure, the target to substrate distance, and also the Li content in the target. The surface morphologies of single phase films obtained with different deposition parameters are compared and deposition parameters to achieve lower loss single-phase films are discussed.
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ГОСТ
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Son J. et al. Pulsed laser deposition of single phase LiNbO3 thin film waveguides // Journal of Electroceramics. 2006. Vol. 17. No. 2-4. pp. 591-595.
ГОСТ со всеми авторами (до 50)
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Son J., Orlov S. S., Phillips B., Hesselink L. Pulsed laser deposition of single phase LiNbO3 thin film waveguides // Journal of Electroceramics. 2006. Vol. 17. No. 2-4. pp. 591-595.
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TY - JOUR
DO - 10.1007/s10832-006-8565-5
UR - https://doi.org/10.1007/s10832-006-8565-5
TI - Pulsed laser deposition of single phase LiNbO3 thin film waveguides
T2 - Journal of Electroceramics
AU - Son, Ji-Won
AU - Orlov, Sergei S.
AU - Phillips, Bill
AU - Hesselink, Lambertus
PY - 2006
DA - 2006/12/01
PB - Springer Nature
SP - 591-595
IS - 2-4
VL - 17
SN - 1385-3449
SN - 1573-8663
ER -
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BibTex (до 50 авторов)
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@article{2006_Son,
author = {Ji-Won Son and Sergei S. Orlov and Bill Phillips and Lambertus Hesselink},
title = {Pulsed laser deposition of single phase LiNbO3 thin film waveguides},
journal = {Journal of Electroceramics},
year = {2006},
volume = {17},
publisher = {Springer Nature},
month = {dec},
url = {https://doi.org/10.1007/s10832-006-8565-5},
number = {2-4},
pages = {591--595},
doi = {10.1007/s10832-006-8565-5}
}
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MLA
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Son, Ji-Won, et al. “Pulsed laser deposition of single phase LiNbO3 thin film waveguides.” Journal of Electroceramics, vol. 17, no. 2-4, Dec. 2006, pp. 591-595. https://doi.org/10.1007/s10832-006-8565-5.
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