Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane
1
Union Carbide Corporation, Linde Division, Somerset, New Jersey 08876, USA
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Publication type: Journal Article
Publication date: 1988-06-01
scimago Q2
wos Q2
SJR: 0.424
CiteScore: 3.6
Impact factor: 2.0
ISSN: 00220248, 18735002
Materials Chemistry
Inorganic Chemistry
Condensed Matter Physics
Abstract
Silane has long been used by semiconductor manufacturers to form thin films of silicon or its compounds. In the future, denser and more complex integrated circuits, as well as new devices such as photovoltaic cells, will require silane of very high purity with impurities specified at parts per trillion levels. A review of manufacturing processes, purification techniques, and analytical methods is presented, with critical attention to the issue of metallic impurity measurement versus resistivity as the preferred method for determination of actual product purity.
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26
Total citations:
26
Citations from 2024:
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(11.54%)
Cite this
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MLA
Cite this
GOST
Copy
Taylor P. Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane // Journal of Crystal Growth. 1988. Vol. 89. No. 1. pp. 28-38.
GOST all authors (up to 50)
Copy
Taylor P. Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane // Journal of Crystal Growth. 1988. Vol. 89. No. 1. pp. 28-38.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1016/0022-0248(88)90068-1
UR - https://doi.org/10.1016/0022-0248(88)90068-1
TI - Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane
T2 - Journal of Crystal Growth
AU - Taylor, Patrick
PY - 1988
DA - 1988/06/01
PB - Elsevier
SP - 28-38
IS - 1
VL - 89
SN - 0022-0248
SN - 1873-5002
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{1988_Taylor,
author = {Patrick Taylor},
title = {Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane},
journal = {Journal of Crystal Growth},
year = {1988},
volume = {89},
publisher = {Elsevier},
month = {jun},
url = {https://doi.org/10.1016/0022-0248(88)90068-1},
number = {1},
pages = {28--38},
doi = {10.1016/0022-0248(88)90068-1}
}
Cite this
MLA
Copy
Taylor, Patrick A.. “Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane.” Journal of Crystal Growth, vol. 89, no. 1, Jun. 1988, pp. 28-38. https://doi.org/10.1016/0022-0248(88)90068-1.