Applied Surface Science, volume 512, pages 145753
Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon
Rodionov Alexey A.
1
,
Shukhov Yuri G.
2
,
Safonov Alexey
1
,
Maximovskiy Eugene A
3
,
Sulyaeva Veronica S.
3
,
Bulgakov Alexander V
4
4
HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnicí 828, 25241 Dolní Břežany, Czech Republic
|
Publication type: Journal Article
Publication date: 2020-05-01
Journal:
Applied Surface Science
Quartile SCImago
Q1
Quartile WOS
Q1
Impact factor: 6.7
ISSN: 01694332
Surfaces, Coatings and Films
General Chemistry
General Physics and Astronomy
Condensed Matter Physics
Surfaces and Interfaces
Abstract
The evolution of the morphology and composition of the single-crystal silicon surface irradiated by infrared and visible nanosecond laser pulses is investigated as a function of processing parameters (laser fluence, irradiation spot size, the number of pulses, background gas pressure and composition). Two types of periodic surface microstructures are obtained with IR (1064 nm) laser pulses in a narrow fluence range of 3–6 J/cm2. At a relatively low number of laser pulses applied, a grid of cleavage cracks is produced within the irradiation spot along the crystal orientation. With further Si irradiation, periodic microhillocks are formed in the nodes of the crack grid. Silicon surface with such microhillocks exhibits superhydrophilic properties which are retained during prolonged storage in air. The cracks are produced in any environment (including vacuum) but the microhillocks are observed only in the presence of oxygen. No periodic structures were observed with visible (532 nm) laser pulses. Mechanisms of nanosecond laser-induced periodic microstructure formation on silicon are discussed.
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- We do not take into account publications that without a DOI.
- Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
- Statistics recalculated weekly.
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Starinskiy S. V. et al. Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon // Applied Surface Science. 2020. Vol. 512. p. 145753.
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Starinskiy S. V., Rodionov A. A., Shukhov Y. G., Safonov A. I., Safonov A., Maximovskiy E. A., Sulyaeva V. S., Bulgakov A. V. Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon // Applied Surface Science. 2020. Vol. 512. p. 145753.
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TY - JOUR
DO - 10.1016/j.apsusc.2020.145753
UR - https://doi.org/10.1016%2Fj.apsusc.2020.145753
TI - Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon
T2 - Applied Surface Science
AU - Starinskiy, Sergey V
AU - Rodionov, Alexey A.
AU - Shukhov, Yuri G.
AU - Safonov, Alexey I
AU - Maximovskiy, Eugene A
AU - Sulyaeva, Veronica S.
AU - Bulgakov, Alexander V
AU - Safonov, Alexey
PY - 2020
DA - 2020/05/01 00:00:00
PB - Elsevier
SP - 145753
VL - 512
SN - 0169-4332
ER -
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@article{2020_Starinskiy,
author = {Sergey V Starinskiy and Alexey A. Rodionov and Yuri G. Shukhov and Alexey I Safonov and Eugene A Maximovskiy and Veronica S. Sulyaeva and Alexander V Bulgakov and Alexey Safonov},
title = {Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon},
journal = {Applied Surface Science},
year = {2020},
volume = {512},
publisher = {Elsevier},
month = {may},
url = {https://doi.org/10.1016%2Fj.apsusc.2020.145753},
pages = {145753},
doi = {10.1016/j.apsusc.2020.145753}
}