Open Access
Micro and Nano Engineering, volume 25, pages 100288
Enhanced plasma etching using nonlinear parameter evolution
Arjun Moothedath
,
Zhong Ren
Publication type: Journal Article
Publication date: 2024-12-01
Journal:
Micro and Nano Engineering
scimago Q2
SJR: 0.489
CiteScore: 3.3
Impact factor: 2.8
ISSN: 25900072
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