Micro-Raman analysis on LiNbO3 substrates and surfaces : Compositional homogeneity and effects of etching and polishing processes on structural properties
P. Galinetto
1
,
M. Marinone
1
,
D. Grando
2
,
G. Samoggia
1
,
F. Caccavale
3
,
A. Morbiato
3
,
M. Musolino
3
1
3
Saes Getters S.p.A., Group Headquarters,viale Italia 77, Lainate—Milano, Italy
|
Publication type: Journal Article
Publication date: 2007-03-01
scimago Q1
wos Q2
SJR: 0.900
CiteScore: 7.1
Impact factor: 3.7
ISSN: 01438166, 18730302
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering
Mechanical Engineering
Abstract
In this work we report on micro-Raman analysis on lithium niobate (LN) substrates in order to study the compositional homogeneity of the crystals and to clear up the effects of etching and polishing processes on the surface of wafers and crystals. The fact that the linewidth of some Raman modes scale with the composition of LN crystals, together with the use of a confocal microscope, allowed a three-dimensional determination of the sample stoichiometry and of the crystalline quality. This local tool can supply additional information, which can be complementary to the electro-optic coefficients, carefully measured as well in order to check functional parameters. Raman spectra from buried regions were obtained on as-grown, etched and polished crystals and wafers. The depth profile of the peak energy and the linewidth of the Raman mode at 872 cm −1 indicate that mechanical processing of surfaces causes, in some cases, structural modifications till a depth of 15 μm.
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Citations from 2024:
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(9.68%)
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GOST
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Galinetto P. et al. Micro-Raman analysis on LiNbO3 substrates and surfaces : Compositional homogeneity and effects of etching and polishing processes on structural properties // Optics and Lasers in Engineering. 2007. Vol. 45. No. 3. pp. 380-384.
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Galinetto P., Marinone M., Grando D., Samoggia G., Caccavale F., Morbiato A., Musolino M. Micro-Raman analysis on LiNbO3 substrates and surfaces : Compositional homogeneity and effects of etching and polishing processes on structural properties // Optics and Lasers in Engineering. 2007. Vol. 45. No. 3. pp. 380-384.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1016/j.optlaseng.2005.05.007
UR - https://doi.org/10.1016/j.optlaseng.2005.05.007
TI - Micro-Raman analysis on LiNbO3 substrates and surfaces : Compositional homogeneity and effects of etching and polishing processes on structural properties
T2 - Optics and Lasers in Engineering
AU - Galinetto, P.
AU - Marinone, M.
AU - Grando, D.
AU - Samoggia, G.
AU - Caccavale, F.
AU - Morbiato, A.
AU - Musolino, M.
PY - 2007
DA - 2007/03/01
PB - Elsevier
SP - 380-384
IS - 3
VL - 45
SN - 0143-8166
SN - 1873-0302
ER -
Cite this
BibTex (up to 50 authors)
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@article{2007_Galinetto,
author = {P. Galinetto and M. Marinone and D. Grando and G. Samoggia and F. Caccavale and A. Morbiato and M. Musolino},
title = {Micro-Raman analysis on LiNbO3 substrates and surfaces : Compositional homogeneity and effects of etching and polishing processes on structural properties},
journal = {Optics and Lasers in Engineering},
year = {2007},
volume = {45},
publisher = {Elsevier},
month = {mar},
url = {https://doi.org/10.1016/j.optlaseng.2005.05.007},
number = {3},
pages = {380--384},
doi = {10.1016/j.optlaseng.2005.05.007}
}
Cite this
MLA
Copy
Galinetto, P., et al. “Micro-Raman analysis on LiNbO3 substrates and surfaces : Compositional homogeneity and effects of etching and polishing processes on structural properties.” Optics and Lasers in Engineering, vol. 45, no. 3, Mar. 2007, pp. 380-384. https://doi.org/10.1016/j.optlaseng.2005.05.007.