Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes
Publication type: Journal Article
Publication date: 2021-05-01
scimago Q1
wos Q2
SJR: 0.783
CiteScore: 7.0
Impact factor: 3.9
ISSN: 0042207X, 18792715
Surfaces, Coatings and Films
Condensed Matter Physics
Instrumentation
Abstract
Using the probe technique, a comparative analysis of parameters of the gas-metal plasma generated by low-pressure discharges is performed during variation of their main characteristics. It is shown that by varying the discharge current of the gas plasma source it is possible to readily change the fraction of gas ions in the gas-metal plasma generated by the arc evaporator and the gas plasma source with thermionic and hollow cathodes. In the case of nitride coatings, it is found out that the concentration of nitrogen in the coatings formed by the vacuum-arc plasma-assisted deposition increases, without any changes in the nitrogen working pressure. Using the coatings based on the Mo–N and Ti–N systems as examples, a twofold increase in the nitrogen concentration is shown as the ion current density of the gas plasma source increases by a factor of three in comparison with the modes without using this source. The method discussed in this study exhibits lower inertia compared to the traditional gas pressure variation.
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12
Total citations:
12
Citations from 2024:
3
(25%)
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Krysina O. et al. Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes // Vacuum. 2021. Vol. 187. p. 110123.
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Krysina O., Koval N. N., Kovalsky S. S., Shugurov V., Lopatin I., Prokopenko N. A., Petrikova E. A. Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes // Vacuum. 2021. Vol. 187. p. 110123.
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RIS
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TY - JOUR
DO - 10.1016/j.vacuum.2021.110123
UR - https://doi.org/10.1016/j.vacuum.2021.110123
TI - Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes
T2 - Vacuum
AU - Krysina, Olga
AU - Koval, N N
AU - Kovalsky, S S
AU - Shugurov, Vladimir
AU - Lopatin, I.V.
AU - Prokopenko, Nikita A
AU - Petrikova, E A
PY - 2021
DA - 2021/05/01
PB - Elsevier
SP - 110123
VL - 187
SN - 0042-207X
SN - 1879-2715
ER -
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@article{2021_Krysina,
author = {Olga Krysina and N N Koval and S S Kovalsky and Vladimir Shugurov and I.V. Lopatin and Nikita A Prokopenko and E A Petrikova},
title = {Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes},
journal = {Vacuum},
year = {2021},
volume = {187},
publisher = {Elsevier},
month = {may},
url = {https://doi.org/10.1016/j.vacuum.2021.110123},
pages = {110123},
doi = {10.1016/j.vacuum.2021.110123}
}