Vacuum, volume 231, pages 113767

SiO2 sputtering by low-energy Ar+, Kr+, and Xe+ ions in plasma conditions

D. R. Shibanov
, 
D V Lopaev
, 
Konstantin Maslakov
, 
M R Konnikova
, 
A T Rakhimov
Publication type: Journal Article
Publication date: 2025-01-01
Journal: Vacuum
scimago Q1
SJR: 0.705
CiteScore: 6.8
Impact factor: 3.8
ISSN: 0042207X, 18792715
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