Vacuum, volume 234, pages 114044

On Relationships between Gas-Phase and Heterogeneous Process Kinetics in CF4 + H2 + Ar Plasma

Andrey Miakonkikh
, 
Vitaly Kuzmenko
, 
Alexander Efremov
, 
Konstantin V. Rudenko
Publication type: Journal Article
Publication date: 2025-04-01
Journal: Vacuum
scimago Q1
SJR: 0.705
CiteScore: 6.8
Impact factor: 3.8
ISSN: 0042207X, 18792715
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