Thickness dependence of optical scattering and surface roughness in microcrystalline silicon
2
Hahn-Meitner-Institut Berlin, Abt. Silizium-Photovoltaik, Kekuléstr. 5, D-12489 Berlin, Germany
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Тип публикации: Journal Article
Дата публикации: 2003-03-01
scimago Q2
wos Q3
БС1
SJR: 0.419
CiteScore: 3.9
Impact factor: 2.0
ISSN: 00406090, 18792731
Materials Chemistry
Metals and Alloys
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Краткое описание
We detail the thickness-dependent increase of optical scattering in microcrystalline silicon by analysis of specular reflection and angle-resolved scattering measurements with a goniometer. The scattering properties are related to the increase in surface roughness with increasing sample thickness. Analysis of the specular reflection in the ultraviolet spectral range allows a determination of the surface roughness. Manipulation of the surface morphology by mechano-chemical polishing results in lesser optical scattering because polishing reduces the surface roughness and thus surface-related scattering.
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Brüggemann R., Reinig P., Hölling M. Thickness dependence of optical scattering and surface roughness in microcrystalline silicon // Thin Solid Films. 2003. Vol. 427. No. 1-2. pp. 358-361.
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Brüggemann R., Reinig P., Hölling M. Thickness dependence of optical scattering and surface roughness in microcrystalline silicon // Thin Solid Films. 2003. Vol. 427. No. 1-2. pp. 358-361.
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TY - JOUR
DO - 10.1016/s0040-6090(02)01230-0
UR - https://doi.org/10.1016/s0040-6090(02)01230-0
TI - Thickness dependence of optical scattering and surface roughness in microcrystalline silicon
T2 - Thin Solid Films
AU - Brüggemann, R.
AU - Reinig, P.
AU - Hölling, M.
PY - 2003
DA - 2003/03/01
PB - Elsevier
SP - 358-361
IS - 1-2
VL - 427
SN - 0040-6090
SN - 1879-2731
ER -
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@article{2003_Brüggemann,
author = {R. Brüggemann and P. Reinig and M. Hölling},
title = {Thickness dependence of optical scattering and surface roughness in microcrystalline silicon},
journal = {Thin Solid Films},
year = {2003},
volume = {427},
publisher = {Elsevier},
month = {mar},
url = {https://doi.org/10.1016/s0040-6090(02)01230-0},
number = {1-2},
pages = {358--361},
doi = {10.1016/s0040-6090(02)01230-0}
}
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MLA
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Brüggemann, R., et al. “Thickness dependence of optical scattering and surface roughness in microcrystalline silicon.” Thin Solid Films, vol. 427, no. 1-2, Mar. 2003, pp. 358-361. https://doi.org/10.1016/s0040-6090(02)01230-0.