Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures
Тип публикации: Journal Article
Дата публикации: 1989-11-01
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БС2
SJR: 0.546
CiteScore: 5.9
Impact factor: 3.1
ISSN: 00092614, 18734448
Physical and Theoretical Chemistry
General Physics and Astronomy
Краткое описание
During low-pressure chemical vapour deposition of SiO2 from thermally activated mixtures of silane and oxygen, laser-induced fluorescence is observed from OH and SiO molecules. From these measurements the rotational and vibrational temperatures are derived. The continuous nature of the observed oxygen chemiluminescence might be explained by a high vibrational temperature, which is not in equilibrium with the rotational temperature. Oxygen molecules are probably excited in the gas-phase reaction step SiO+O+O2→SiO2+O2*.
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Van De Weijer P., Zwerver B. H. Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures // Chemical Physics Letters. 1989. Vol. 163. No. 1. pp. 48-54.
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Van De Weijer P., Zwerver B. H. Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures // Chemical Physics Letters. 1989. Vol. 163. No. 1. pp. 48-54.
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TY - JOUR
DO - 10.1016/0009-2614(89)80009-0
UR - https://doi.org/10.1016/0009-2614(89)80009-0
TI - Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures
T2 - Chemical Physics Letters
AU - Van De Weijer, Peter
AU - Zwerver, Bauke H
PY - 1989
DA - 1989/11/01
PB - Elsevier
SP - 48-54
IS - 1
VL - 163
SN - 0009-2614
SN - 1873-4448
ER -
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@article{1989_Van De Weijer,
author = {Peter Van De Weijer and Bauke H Zwerver},
title = {Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures},
journal = {Chemical Physics Letters},
year = {1989},
volume = {163},
publisher = {Elsevier},
month = {nov},
url = {https://doi.org/10.1016/0009-2614(89)80009-0},
number = {1},
pages = {48--54},
doi = {10.1016/0009-2614(89)80009-0}
}
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Van De Weijer, Peter, and Bauke H Zwerver. “Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures.” Chemical Physics Letters, vol. 163, no. 1, Nov. 1989, pp. 48-54. https://doi.org/10.1016/0009-2614(89)80009-0.