A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area
Elena Pershina
1
,
J V Bondareva
1, 2
,
P. A. Nekludova
1
,
Anastasia A. Shibalova
1
,
Maxim Shibalov
1
,
Yu V Anufriev
1
,
A M Tagachenkov
1
,
Тип публикации: Journal Article
Дата публикации: 2023-10-01
scimago Q1
wos Q1
БС1
SJR: 2.320
CiteScore: 21.4
Impact factor: 11.6
ISSN: 00086223, 18733891
General Chemistry
General Materials Science
Краткое описание
In this study, n-diamond–carbon nanowalls hybrid structure was synthesized on a 4-inch diameter silicon wafer by RF-PECVD technique (type CCP). A comprehensive analysis of the structure was carried out at the beginning of growth and after a long period of synthesis using electron microscopy, transmission microscopy, Raman spectroscopy, and X-ray diffraction techniques. As the analysis showed, feeding carbon monoxide (CO) to a gas mixture of methane (CH4), argon (Ar), and hydrogen (H2) induces the formation of n-diamond particles in a basal layer. By using plasma-enhanced etching in an oxygen-containing medium, carbon nanowalls (CNWs) were successfully removed, and the underlying layer containing n-diamond was analyzed. For the first time, X-ray diffraction results of a separate n-diamond phase were obtained for this layer.
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Mumlyakov A. et al. A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area // Carbon. 2023. Vol. 214. p. 118332.
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Mumlyakov A., Pershina E., Bondareva J. V., Nekludova P. A., Shibalova A. A., Shibalov M., Anufriev Yu. V., Tagachenkov A. M., Tarkhov M. A. A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area // Carbon. 2023. Vol. 214. p. 118332.
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TY - JOUR
DO - 10.1016/j.carbon.2023.118332
UR - https://linkinghub.elsevier.com/retrieve/pii/S0008622323005778
TI - A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area
T2 - Carbon
AU - Mumlyakov, Alexander
AU - Pershina, Elena
AU - Bondareva, J V
AU - Nekludova, P. A.
AU - Shibalova, Anastasia A.
AU - Shibalov, Maxim
AU - Anufriev, Yu V
AU - Tagachenkov, A M
AU - Tarkhov, M. A.
PY - 2023
DA - 2023/10/01
PB - Elsevier
SP - 118332
VL - 214
SN - 0008-6223
SN - 1873-3891
ER -
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@article{2023_Mumlyakov,
author = {Alexander Mumlyakov and Elena Pershina and J V Bondareva and P. A. Nekludova and Anastasia A. Shibalova and Maxim Shibalov and Yu V Anufriev and A M Tagachenkov and M. A. Tarkhov},
title = {A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area},
journal = {Carbon},
year = {2023},
volume = {214},
publisher = {Elsevier},
month = {oct},
url = {https://linkinghub.elsevier.com/retrieve/pii/S0008622323005778},
pages = {118332},
doi = {10.1016/j.carbon.2023.118332}
}