Characterization of iron oxide coatings prepared by MOCVD method from Fe(CO)5
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Publication type: Journal Article
Publication date: 2020-01-23
General Medicine
Abstract
This work dedicated the study of iron oxide deposition by metalorganic chemical vapour deposition (MOCVD) in hot-walls reactor with Fe(CO)5 in Ar-O2 atmosphere under pressure about 70 Pa. Phase and structure studied by x-ray photoelectron spectroscopy (XPS) and reflection high-energy electron diffraction(RHEED). This analysis also gives information for some common factors of MOCVD decomposition of Fe(CO)5. Topology of the coatings studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM). Optical properties of the coatings studied with spectrophotometer. There was identificated that coatings which was made by MOCVD on Si 〈1 0 0〉 substrate has a cluster structure which size increase with deposition time and supposed Volmer-Weber growth mode.
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Bespalova P. G. et al. Characterization of iron oxide coatings prepared by MOCVD method from Fe(CO)5 // Materials Today: Proceedings. 2020. Vol. 30. pp. 434-438.
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Bespalova P. G., Vorobyev A., Shakhmin A. L., Kunkel T., Mishin M. V. Characterization of iron oxide coatings prepared by MOCVD method from Fe(CO)5 // Materials Today: Proceedings. 2020. Vol. 30. pp. 434-438.
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TY - JOUR
DO - 10.1016/j.matpr.2019.12.391
UR - https://doi.org/10.1016/j.matpr.2019.12.391
TI - Characterization of iron oxide coatings prepared by MOCVD method from Fe(CO)5
T2 - Materials Today: Proceedings
AU - Bespalova, Polina G
AU - Vorobyev, Alexandr
AU - Shakhmin, Alexandr L
AU - Kunkel, Tatyana
AU - Mishin, Maxim V.
PY - 2020
DA - 2020/01/23
PB - Elsevier
SP - 434-438
VL - 30
SN - 2214-7853
ER -
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@article{2020_Bespalova,
author = {Polina G Bespalova and Alexandr Vorobyev and Alexandr L Shakhmin and Tatyana Kunkel and Maxim V. Mishin},
title = {Characterization of iron oxide coatings prepared by MOCVD method from Fe(CO)5},
journal = {Materials Today: Proceedings},
year = {2020},
volume = {30},
publisher = {Elsevier},
month = {jan},
url = {https://doi.org/10.1016/j.matpr.2019.12.391},
pages = {434--438},
doi = {10.1016/j.matpr.2019.12.391}
}