Materials Science in Semiconductor Processing

, volume 139 , pages 106350

Crystallization of GST225 thin film induced by a single femtosecond laser pulse: Experimental and theoretical study

Tatyana Kunkel ¹

Yuri V. Vorobyov ²

Mikhail Smayev ^{3, 4}

Alexey Romashkin ⁵

Petr I. Lazarenko ⁵

Sergey A. Kozyukhin ⁶

Hide authors affiliations Show authors affiliations: 6 affiliations

Moscow Institute of Physics and Technology, 9 Institutskiy per., Dolgoprudny, 141701, Russia |

Ryazan State Radio Engineering University, 59/1 Gagarin St., Ryazan, 390005, Russia |

Lebedev Physical Institute, Russian Academy of Sciences, 53 Leninsky Pr., Moscow, 119991, Russia |

⁴

Mendeleev University of Chemical Technology of Russia, 9 Miusskaya Sq., Moscow, 125047, Russia |

⁵

National Research University of Electronic Technology, 1 Shokin Sq., Zelenograd, 124498, Russia |

⁶

Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, 31 Leninski Pr., Moscow, 119991, Russia |

Publication type: Journal Article

Publication date: 2022-03-01

Elsevier

Materials Science in Semiconductor Processing

scimago Q1

wos Q2

SJR: 0.785

CiteScore: 8.4

Impact factor: 4.6

ISSN: 13698001, 18734081

DOI: 10.1016/j.mssp.2021.106350

Copy DOI

Condensed Matter Physics

General Materials Science

Mechanical Engineering

Mechanics of Materials

Abstract

Amorphous to crystalline phase transition in Ge 2 Sb 2 Te 5 film under the influence of a single femtosecond laser pulse is studied. Two-dimensional temperature calculations and kinetic model for crystallization were used to support experimental results and then to explain the fast mechanism of crystallization. Based on comparison with the experimental data, the theoretical Time-Temperature-Transformation diagram was calculated, that allowed to define the range of cooling rates at which crystallization is possible. The distribution of crystalline fraction in the thin film was calculated using these rates. Reflectance of the simulated structures turned out to be in good agreement with experimental observations. • Crystallization with single femtosecond laser pulse in Ge 2 Sb 2 Te 5 films was observed. • TTT diagram was calculated to determine critical cooling rate for crystallization. • Purely thermal simulation reproduces the experimental data quite well.

Found

5 citations

Kozyukhin Sergey

🥼 🤝

DSc in Chemistry, professor

194 publications, 1 512 citations, 2 reviews

h-index: 20

Moscow Institute of Physics and Technology

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

4 citations

Lazarenko Petr

PhD in Engineering

82 publications, 497 citations

h-index: 14

National Research University of Electronic Technology

Research interests

Condensed matter physics

Laser processing of materials

2 citations

Kiselev Aleksey

🥼 🤝

PhD in Physics and Mathematics

25 publications, 138 citations, 1 review

h-index: 7

Institute On Laser and Information Technologies

Kurchatov Complex of Crystallography and Photonics of NRC «Kurchatov Institute»

2 citations

Lotin Andrey

PhD in Physics and Mathematics

71 publications, 391 citations

h-index: 12

Institute On Laser and Information Technologies

2 citations

Burtsev Anton

🤝

15 publications, 99 citations

h-index: 6

Institute On Laser and Information Technologies

2 citations

Eliseev Nikolai

🤝

20 publications, 127 citations

h-index: 7

Kurchatov Complex of Crystallography and Photonics of NRC «Kurchatov Institute»

Institute On Laser and Information Technologies

2 citations

Mikhalevsky Vladimir

35 publications, 197 citations

h-index: 9

Institute On Laser and Information Technologies

1 citation

Eremenko Igor

DSc in Chemistry, professor, full member of the Russian Academy of Sciences

674 publications, 7 718 citations, 29 reviews

h-index: 35

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

1 citation

Ermachikhin Alexander

🤝

PhD in Physics and Mathematics

48 publications, 91 citations

h-index: 5

Ryazan State Radio Engineering University

Research interests

Automation of the experiment

1 citation

Yakubov Alexey

🥼 🤝

PhD in Engineering

29 publications, 118 citations

h-index: 7

National Research University of Electronic Technology

1 citation

Kovalyuk Vadim

PhD in Physics and Mathematics

87 publications, 873 citations

h-index: 13

National Research University Higher School of Economics

National University of Science & Technology (MISiS)

Moscow Pedagogical State University

Russian Quantum Center

1 citation

Dubkov Sergey

🤝

PhD in Engineering

71 publications, 490 citations, 2 reviews

h-index: 12

National Research University of Electronic Technology

Research interests

Carbon materials

Filamentous nanocrystals

Hydrothermal synthesis

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GOST Copy

Kunkel T. et al. Crystallization of GST225 thin film induced by a single femtosecond laser pulse: Experimental and theoretical study // Materials Science in Semiconductor Processing. 2022. Vol. 139. p. 106350.

GOST all authors (up to 50) Copy

Kunkel T., Vorobyov Y. V., Smayev M., Romashkin A., Lazarenko P. I., Kozyukhin S. A. Crystallization of GST225 thin film induced by a single femtosecond laser pulse: Experimental and theoretical study // Materials Science in Semiconductor Processing. 2022. Vol. 139. p. 106350.

RIS |

Cite this

RIS Copy

TY - JOUR

DO - 10.1016/j.mssp.2021.106350

UR - https://doi.org/10.1016/j.mssp.2021.106350

TI - Crystallization of GST225 thin film induced by a single femtosecond laser pulse: Experimental and theoretical study

T2 - Materials Science in Semiconductor Processing

AU - Kunkel, Tatyana

AU - Vorobyov, Yuri V.

AU - Smayev, Mikhail

AU - Romashkin, Alexey

AU - Lazarenko, Petr I.

AU - Kozyukhin, Sergey A.

PY - 2022

DA - 2022/03/01

PB - Elsevier

SP - 106350

VL - 139

SN - 1369-8001

SN - 1873-4081

ER -

BibTex

Cite this

BibTex (up to 50 authors) Copy

@article{2022_Kunkel,

author = {Tatyana Kunkel and Yuri V. Vorobyov and Mikhail Smayev and Alexey Romashkin and Petr I. Lazarenko and Sergey A. Kozyukhin},

title = {Crystallization of GST225 thin film induced by a single femtosecond laser pulse: Experimental and theoretical study},

journal = {Materials Science in Semiconductor Processing},

year = {2022},

volume = {139},

publisher = {Elsevier},

month = {mar},

url = {https://doi.org/10.1016/j.mssp.2021.106350},

pages = {106350},

doi = {10.1016/j.mssp.2021.106350}

}

Publisher

Elsevier

Journal

Materials Science in Semiconductor Processing

scimago Q1

wos Q2

SJR

0.785

CiteScore

8.4

Impact factor

4.6

ISSN

13698001 (Print)

18734081

Labs

Colour Centre IGIС RAS

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