Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts
Publication type: Journal Article
Publication date: 2010-02-26
scimago Q2
wos Q1
SJR: 0.465
CiteScore: 1.3
Impact factor: 3.0
ISSN: 14319276, 14358115
PubMed ID:
20187989
Instrumentation
Abstract
The three-dimensional (3D) distribution of carbon nanotubes (CNTs) grown inside semiconductor contact holes is studied by electron tomography. The use of a specialized tomography holder results in an angular tilt range of ±90°, which means that the so-called “missing wedge” is absent. The transmission electron microscopy (TEM) sample for this purpose consists of a micropillar that is prepared by a dedicated procedure using the focused ion beam (FIB) but keeping the CNTs intact. The 3D results are combined with energy dispersive X-ray spectroscopy (EDS) to study the relation between the CNTs and the catalyst particles used during their growth. The reconstruction, based on the full range of tilt angles, is compared with a reconstruction where a missing wedge is present. This clearly illustates that the missing wedge will lead to an unreliable interpretation and will limit quantitative studies.
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47
Total citations:
47
Citations from 2024:
1
(2.13%)
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MLA
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GOST
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Ke X. et al. Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts // Microscopy and Microanalysis. 2010. Vol. 16. No. 2. pp. 210-217.
GOST all authors (up to 50)
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Ke X., Bals S., Cott D., Hantschel T., Bender H., Van Tendeloo G. Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts // Microscopy and Microanalysis. 2010. Vol. 16. No. 2. pp. 210-217.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1017/S1431927609991371
UR - https://doi.org/10.1017/S1431927609991371
TI - Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts
T2 - Microscopy and Microanalysis
AU - Ke, Xiaoxing
AU - Bals, Sara
AU - Cott, Daire
AU - Hantschel, Thomas
AU - Bender, Hugo
AU - Van Tendeloo, Gustaaf
PY - 2010
DA - 2010/02/26
PB - Oxford University Press
SP - 210-217
IS - 2
VL - 16
PMID - 20187989
SN - 1431-9276
SN - 1435-8115
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2010_Ke,
author = {Xiaoxing Ke and Sara Bals and Daire Cott and Thomas Hantschel and Hugo Bender and Gustaaf Van Tendeloo},
title = {Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts},
journal = {Microscopy and Microanalysis},
year = {2010},
volume = {16},
publisher = {Oxford University Press},
month = {feb},
url = {https://doi.org/10.1017/S1431927609991371},
number = {2},
pages = {210--217},
doi = {10.1017/S1431927609991371}
}
Cite this
MLA
Copy
Ke, Xiaoxing, et al. “Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts.” Microscopy and Microanalysis, vol. 16, no. 2, Feb. 2010, pp. 210-217. https://doi.org/10.1017/S1431927609991371.