Chemistry of Materials, volume 36, issue 6, pages 2661-2673

Organosulfide Inhibitor Instigated Passivation of Multiple Substrates for Area-Selective Atomic Layer Deposition of HfO2

Publication type: Journal Article
Publication date: 2024-02-22
scimago Q1
SJR: 2.421
CiteScore: 14.1
Impact factor: 7.2
ISSN: 08974756, 15205002
Materials Chemistry
General Chemistry
General Chemical Engineering
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