American Chemical Society (ACS)
ACS Applied Nano Materials
,  volume 5 ,  issue 1 ,  pages 1047-1055

Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter

Publication type: Journal Article
Publication date: 2021-12-26
American Chemical Society (ACS)
scimago Q1
wos Q2
SJR: 1.121
CiteScore: 8.1
Impact factor: 5.5
ISSN: 25740970
General Materials Science
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GOST |
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GOST Copy
Chen G. et al. Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter // ACS Applied Nano Materials. 2021. Vol. 5. No. 1. pp. 1047-1055.
GOST all authors (up to 50) Copy
Chen G., Liu X., Wei T., Zhang K., Wang Y., Zhu Z., Wei J. Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter // ACS Applied Nano Materials. 2021. Vol. 5. No. 1. pp. 1047-1055.
RIS |
Cite this
RIS Copy
TY - JOUR
DO - 10.1021/acsanm.1c03707
UR - https://doi.org/10.1021/acsanm.1c03707
TI - Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter
T2 - ACS Applied Nano Materials
AU - Chen, Guodong
AU - Liu, Xing
AU - Wei, Tao
AU - Zhang, Kui
AU - Wang, Yang
AU - Zhu, Zhendong
AU - Wei, Jingsong
PY - 2021
DA - 2021/12/26
PB - American Chemical Society (ACS)
SP - 1047-1055
IS - 1
VL - 5
SN - 2574-0970
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2021_Chen,
author = {Guodong Chen and Xing Liu and Tao Wei and Kui Zhang and Yang Wang and Zhendong Zhu and Jingsong Wei},
title = {Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter},
journal = {ACS Applied Nano Materials},
year = {2021},
volume = {5},
publisher = {American Chemical Society (ACS)},
month = {dec},
url = {https://doi.org/10.1021/acsanm.1c03707},
number = {1},
pages = {1047--1055},
doi = {10.1021/acsanm.1c03707}
}
MLA
Cite this
MLA Copy
Chen, Guodong, et al. “Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter.” ACS Applied Nano Materials, vol. 5, no. 1, Dec. 2021, pp. 1047-1055. https://doi.org/10.1021/acsanm.1c03707.