Optical hydrogen sensing with high-Q guided-mode resonance of Al2O3/WO3/Pd nanostructure

Nanostructure based on a dielectric grating (Al₂O₃), gasochromic oxide (WO₃) and catalyst (Pd) is proposed as a hydrogen sensor working at the room temperature. In the fabricated structure, the Pd catalyst film was as thin as 1 nm that allowed a significant decrease in the optical absorption. A high-Q guided-mode resonance was observed in a transmission spectrum at normal incidence and was utilized for hydrogen detection. The spectra were measured at 0–0.12% of hydrogen in a synthetic air (≈ 80% $${\text{N}}_{2}$$ N 2 and 20% $${\text{O}}_{2}$$ O 2 ). The detection limit below 100 ppm of hydrogen was demonstrated. Hydrogen was detected in the presence of oxygen, which provides the sensor recovery but suppresses the sensor response. Sensor response was treated by the principal component analysis (PCA), which effectively performs noise averaging. Influence of temperature and humidity was measured and processed by PCA, and elimination of the humidity and temperature effects was performed. Square root dependence of the sensor response on the hydrogen concentration (Sievert’s law) was observed. Sensor calibration curve was built, and the sensor resolution of 40 ppm was found. Long term stability of the sensor was investigated. Particularly, it was shown that the sensor retains its functionality after 6 months and dozens of acts of response to gas.