Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation
Publication type: Proceedings Article
Publication date: 2019-01-16
SJR: 0.153
CiteScore: 0.5
Impact factor: —
ISSN: 0094243X, 15517616
Found
Nothing found, try to update filter.
Found
Nothing found, try to update filter.
Top-30
Journals
|
1
2
|
|
|
Nanotechnology
2 publications, 28.57%
|
|
|
Beilstein Journal of Nanotechnology
1 publication, 14.29%
|
|
|
Micromachines
1 publication, 14.29%
|
|
|
Bioengineered
1 publication, 14.29%
|
|
|
Crystallography Reports
1 publication, 14.29%
|
|
|
Кристаллография
1 publication, 14.29%
|
|
|
1
2
|
Publishers
|
1
2
|
|
|
IOP Publishing
2 publications, 28.57%
|
|
|
Pleiades Publishing
2 publications, 28.57%
|
|
|
Beilstein-Institut
1 publication, 14.29%
|
|
|
MDPI
1 publication, 14.29%
|
|
|
Taylor & Francis
1 publication, 14.29%
|
|
|
1
2
|
- We do not take into account publications without a DOI.
- Statistics recalculated weekly.
Are you a researcher?
Create a profile to get free access to personal recommendations for colleagues and new articles.
Metrics
7
Total citations:
7
Citations from 2024:
2
(28.57%)
Cite this
GOST |
RIS |
BibTex
Cite this
GOST
Copy
Petrov Yu. V. et al. Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation // AIP Conference Proceedings. 2019. Vol. 2064. p. 30012.
GOST all authors (up to 50)
Copy
Petrov Yu. V., Ubyivovk E., Baraban A. Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation // AIP Conference Proceedings. 2019. Vol. 2064. p. 30012.
Cite this
RIS
Copy
TY - CPAPER
DO - 10.1063/1.5087674
UR - https://pubs.aip.org/aip/acp/article/599751
TI - Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation
T2 - AIP Conference Proceedings
AU - Petrov, Yu V
AU - Ubyivovk, Evgeniy
AU - Baraban, A.P.
PY - 2019
DA - 2019/01/16
PB - AIP Publishing
SP - 30012
VL - 2064
SN - 0094-243X
SN - 1551-7616
ER -
Cite this
BibTex (up to 50 authors)
Copy
@inproceedings{2019_Petrov,
author = {Yu V Petrov and Evgeniy Ubyivovk and A.P. Baraban},
title = {Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation},
year = {2019},
volume = {2064},
pages = {30012},
month = {jan},
publisher = {AIP Publishing}
}