Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses
Andrei A. Ionin
1
,
E. V. Golosov
2
,
Yu.R. Kolobov
2
,
Sergei I. Kudryashov
3
,
A. E. Ligachev
2
,
Yurii N Novoselov
2
,
Leonid Seleznev
2
,
D. V. Sinitsyn
2
Тип публикации: Journal Article
Дата публикации: 2011-09-30
scimago Q3
БС2
SJR: 0.233
CiteScore: —
Impact factor: —
ISSN: 10637818, 14684799
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering
Statistical and Nonlinear Physics
Краткое описание
Quasi-periodic nano- and microstructures have been formed on silicon surface using IR ( l » 744 nm) and UV ( l » 248 nm) femtosecond laser pulses. The influence of the incident laser fluence and the number of pulses on the structured surface topology has been investigated. The silicon nanostructuring thresholds have been determined for the above-mentioned wavelengths. Modulation of the surface relief at the doubled spatial frequency is revealed and explained qualitatively. The periods of the nanostructures formed on the silicon surface under IR and UV femtosecond laser pulses are comparatively analysed and discussed.
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Ionin A. A. et al. Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses // Quantum Electronics. 2011. Vol. 41. No. 9. pp. 829-834.
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Ionin A. A., Golosov E. V., Kolobov Y., Kudryashov S. I., Ligachev A. E., Makarov S. V., Novoselov Y. N., Seleznev L., Sinitsyn D. V. Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses // Quantum Electronics. 2011. Vol. 41. No. 9. pp. 829-834.
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TY - JOUR
DO - 10.1070/QE2011v041n09ABEH014530
UR - https://doi.org/10.1070/QE2011v041n09ABEH014530
TI - Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses
T2 - Quantum Electronics
AU - Ionin, Andrei A.
AU - Golosov, E. V.
AU - Kolobov, Yu.R.
AU - Kudryashov, Sergei I.
AU - Ligachev, A. E.
AU - Makarov, Sergei V.
AU - Novoselov, Yurii N
AU - Seleznev, Leonid
AU - Sinitsyn, D. V.
PY - 2011
DA - 2011/09/30
PB - IOP Publishing
SP - 829-834
IS - 9
VL - 41
SN - 1063-7818
SN - 1468-4799
ER -
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BibTex (до 50 авторов)
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@article{2011_Ionin,
author = {Andrei A. Ionin and E. V. Golosov and Yu.R. Kolobov and Sergei I. Kudryashov and A. E. Ligachev and Sergei V. Makarov and Yurii N Novoselov and Leonid Seleznev and D. V. Sinitsyn},
title = {Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses},
journal = {Quantum Electronics},
year = {2011},
volume = {41},
publisher = {IOP Publishing},
month = {sep},
url = {https://doi.org/10.1070/QE2011v041n09ABEH014530},
number = {9},
pages = {829--834},
doi = {10.1070/QE2011v041n09ABEH014530}
}
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MLA
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Ionin, Andrei A., et al. “Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses.” Quantum Electronics, vol. 41, no. 9, Sep. 2011, pp. 829-834. https://doi.org/10.1070/QE2011v041n09ABEH014530.