volume 41 issue 9 pages 829-834

Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses

Publication typeJournal Article
Publication date2011-09-30
scimago Q3
SJR0.233
CiteScore
Impact factor
ISSN10637818, 14684799
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering
Statistical and Nonlinear Physics
Abstract
Quasi-periodic nano- and microstructures have been formed on silicon surface using IR ( l » 744 nm) and UV ( l » 248 nm) femtosecond laser pulses. The influence of the incident laser fluence and the number of pulses on the structured surface topology has been investigated. The silicon nanostructuring thresholds have been determined for the above-mentioned wavelengths. Modulation of the surface relief at the doubled spatial frequency is revealed and explained qualitatively. The periods of the nanostructures formed on the silicon surface under IR and UV femtosecond laser pulses are comparatively analysed and discussed.
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Ionin A. A. et al. Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses // Quantum Electronics. 2011. Vol. 41. No. 9. pp. 829-834.
GOST all authors (up to 50) Copy
Ionin A. A., Golosov E. V., Kolobov Y., Kudryashov S. I., Ligachev A. E., Makarov S. V., Novoselov Y. N., Seleznev L., Sinitsyn D. V. Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses // Quantum Electronics. 2011. Vol. 41. No. 9. pp. 829-834.
RIS |
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RIS Copy
TY - JOUR
DO - 10.1070/QE2011v041n09ABEH014530
UR - https://doi.org/10.1070/QE2011v041n09ABEH014530
TI - Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses
T2 - Quantum Electronics
AU - Ionin, Andrei A.
AU - Golosov, E. V.
AU - Kolobov, Yu.R.
AU - Kudryashov, Sergei I.
AU - Ligachev, A. E.
AU - Makarov, Sergei V.
AU - Novoselov, Yurii N
AU - Seleznev, Leonid
AU - Sinitsyn, D. V.
PY - 2011
DA - 2011/09/30
PB - IOP Publishing
SP - 829-834
IS - 9
VL - 41
SN - 1063-7818
SN - 1468-4799
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2011_Ionin,
author = {Andrei A. Ionin and E. V. Golosov and Yu.R. Kolobov and Sergei I. Kudryashov and A. E. Ligachev and Sergei V. Makarov and Yurii N Novoselov and Leonid Seleznev and D. V. Sinitsyn},
title = {Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses},
journal = {Quantum Electronics},
year = {2011},
volume = {41},
publisher = {IOP Publishing},
month = {sep},
url = {https://doi.org/10.1070/QE2011v041n09ABEH014530},
number = {9},
pages = {829--834},
doi = {10.1070/QE2011v041n09ABEH014530}
}
MLA
Cite this
MLA Copy
Ionin, Andrei A., et al. “Formation of quasi-periodic nano- and microstructures on silicon surface under IR and UV femtosecond laser pulses.” Quantum Electronics, vol. 41, no. 9, Sep. 2011, pp. 829-834. https://doi.org/10.1070/QE2011v041n09ABEH014530.