Taylor & Francis
Ferroelectrics
,  том 560 ,  издание 1 ,  страницы 95-101

Interferometric measurements of graphene-based membranes for micromechanical applications

Тип публикации: Journal Article
Дата публикации: 2020-05-18
Taylor & Francis
scimago Q4
wos Q4
БС3
SJR: 0.195
CiteScore: 1.3
Impact factor: 0.6
ISSN: 00150193, 15635112
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Краткое описание
Abstract Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.
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Ushakov A. D. et al. Interferometric measurements of graphene-based membranes for micromechanical applications // Ferroelectrics. 2020. Vol. 560. No. 1. pp. 95-101.
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Ushakov A. D., Akhmatkhanov A. R., Akhmatkhanov A. R., Chichkov M. V., Turutin A. V., Turutin A. V., Chuvakova M. A., Kravchenko I., Kravchenko I., Ya Shur V., Shur V. Y., KHOLKIN A. L., Kholkin A. L. Interferometric measurements of graphene-based membranes for micromechanical applications // Ferroelectrics. 2020. Vol. 560. No. 1. pp. 95-101.
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TY - JOUR
DO - 10.1080/00150193.2020.1722889
UR - https://doi.org/10.1080/00150193.2020.1722889
TI - Interferometric measurements of graphene-based membranes for micromechanical applications
T2 - Ferroelectrics
AU - Ushakov, A D
AU - Akhmatkhanov, A R
AU - Akhmatkhanov, Andrey R.
AU - Chichkov, M V
AU - Turutin, A V
AU - Turutin, A. V.
AU - Chuvakova, M A
AU - Kravchenko, I
AU - Kravchenko, Ivan
AU - Ya Shur, V
AU - Shur, Vladimir Ya.
AU - KHOLKIN, A. L.
AU - Kholkin, Andrei L.
PY - 2020
DA - 2020/05/18
PB - Taylor & Francis
SP - 95-101
IS - 1
VL - 560
SN - 0015-0193
SN - 1563-5112
ER -
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@article{2020_Ushakov,
author = {A D Ushakov and A R Akhmatkhanov and Andrey R. Akhmatkhanov and M V Chichkov and A V Turutin and A. V. Turutin and M A Chuvakova and I Kravchenko and Ivan Kravchenko and V Ya Shur and Vladimir Ya. Shur and A. L. KHOLKIN and Andrei L. Kholkin},
title = {Interferometric measurements of graphene-based membranes for micromechanical applications},
journal = {Ferroelectrics},
year = {2020},
volume = {560},
publisher = {Taylor & Francis},
month = {may},
url = {https://doi.org/10.1080/00150193.2020.1722889},
number = {1},
pages = {95--101},
doi = {10.1080/00150193.2020.1722889}
}
MLA
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Ushakov, A. D., et al. “Interferometric measurements of graphene-based membranes for micromechanical applications.” Ferroelectrics, vol. 560, no. 1, May. 2020, pp. 95-101. https://doi.org/10.1080/00150193.2020.1722889.