Diffusion phenomena in atomic layer deposition
Publication type: Journal Article
Publication date: 2012-06-22
scimago Q2
wos Q3
SJR: 0.405
CiteScore: 4.2
Impact factor: 2.1
ISSN: 02681242, 13616641
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
Atomic layer deposition (ALD) is a mature technology for the deposition of conformal thin films. During the ALD process or in a post-treatment, a variety of diffusion phenomena can occur which can not only deteriorate the desired product, but also can be used to fabricate materials or structures in a novel way. This special issue reviews some of the observed diffusion processes and strategies to make use of those. (Some figures may appear in colour only in the online journal)
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23
Total citations:
23
Citations from 2024:
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(4.35%)
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MLA
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GOST
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Knez M. Diffusion phenomena in atomic layer deposition // Semiconductor Science and Technology. 2012. Vol. 27. No. 7. p. 74001.
GOST all authors (up to 50)
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Knez M. Diffusion phenomena in atomic layer deposition // Semiconductor Science and Technology. 2012. Vol. 27. No. 7. p. 74001.
Cite this
RIS
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TY - JOUR
DO - 10.1088/0268-1242/27/7/074001
UR - https://doi.org/10.1088/0268-1242/27/7/074001
TI - Diffusion phenomena in atomic layer deposition
T2 - Semiconductor Science and Technology
AU - Knez, Mato
PY - 2012
DA - 2012/06/22
PB - IOP Publishing
SP - 74001
IS - 7
VL - 27
SN - 0268-1242
SN - 1361-6641
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2012_Knez,
author = {Mato Knez},
title = {Diffusion phenomena in atomic layer deposition},
journal = {Semiconductor Science and Technology},
year = {2012},
volume = {27},
publisher = {IOP Publishing},
month = {jun},
url = {https://doi.org/10.1088/0268-1242/27/7/074001},
number = {7},
pages = {74001},
doi = {10.1088/0268-1242/27/7/074001}
}
Cite this
MLA
Copy
Knez, Mato. “Diffusion phenomena in atomic layer deposition.” Semiconductor Science and Technology, vol. 27, no. 7, Jun. 2012, p. 74001. https://doi.org/10.1088/0268-1242/27/7/074001.