volume 27 issue 7 pages 74002

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

D Garcia-Alonso 1
W. M. Kessels 1
Publication typeJournal Article
Publication date2012-06-22
scimago Q2
wos Q3
SJR0.405
CiteScore4.2
Impact factor2.1
ISSN02681242, 13616641
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
Atomic layer deposition (ALD) is a vapour-phase deposition technique capable of depositing high quality, uniform and conformal thin films at relatively low temperatures. These outstanding properties can be employed to face processing challenges for various types of next-generation solar cells; hence, ALD for photovoltaics (PV) has attracted great interest in academic and industrial research in recent years. In this review, the recent progress of ALD layers applied to various solar cell concepts and their future prospects are discussed. Crystalline silicon (c-Si), copper indium gallium selenide (CIGS) and dye-sensitized solar cells (DSSCs) benefit from the application of ALD surface passivation layers, buffer layers and barrier layers, respectively. ALD films are also excellent moisture permeation barriers that have been successfully used to encapsulate flexible CIGS and organic photovoltaic (OPV) cells. Furthermore, some emerging applications of the ALD method in solar cell research are reviewed. The potential of ALD for solar cells manufacturing is discussed, and the current status of high-throughput ALD equipment development is presented. ALD is on the verge of being introduced in the PV industry and it is expected that it will be part of the standard solar cell manufacturing equipment in the near future.
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GOST Copy
Garcia-Alonso D., Kessels W. M. Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing // Semiconductor Science and Technology. 2012. Vol. 27. No. 7. p. 74002.
GOST all authors (up to 50) Copy
Garcia-Alonso D., Kessels W. M. Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing // Semiconductor Science and Technology. 2012. Vol. 27. No. 7. p. 74002.
RIS |
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RIS Copy
TY - JOUR
DO - 10.1088/0268-1242/27/7/074002
UR - https://doi.org/10.1088/0268-1242/27/7/074002
TI - Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing
T2 - Semiconductor Science and Technology
AU - Garcia-Alonso, D
AU - Kessels, W. M.
PY - 2012
DA - 2012/06/22
PB - IOP Publishing
SP - 74002
IS - 7
VL - 27
SN - 0268-1242
SN - 1361-6641
ER -
BibTex |
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BibTex (up to 50 authors) Copy
@article{2012_Van Delft,
author = {D Garcia-Alonso and W. M. Kessels},
title = {Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing},
journal = {Semiconductor Science and Technology},
year = {2012},
volume = {27},
publisher = {IOP Publishing},
month = {jun},
url = {https://doi.org/10.1088/0268-1242/27/7/074002},
number = {7},
pages = {74002},
doi = {10.1088/0268-1242/27/7/074002}
}
MLA
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MLA Copy
Van Delft, J. A., et al. “Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing.” Semiconductor Science and Technology, vol. 27, no. 7, Jun. 2012, p. 74002. https://doi.org/10.1088/0268-1242/27/7/074002.