Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition
Тип публикации: Journal Article
Дата публикации: 2018-06-05
scimago Q1
wos Q2
БС1
SJR: 0.650
CiteScore: 6.4
Impact factor: 3.2
ISSN: 00223727, 13616463
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Acoustics and Ultrasonics
Краткое описание
We propose a novel approach for synthesizing silicon surfaces ensuring arbitrary apparent contact angle within the range from 0° to 170° for water. Superhydrophilicity of silicon substrates is achieved by nanosecond laser treatment and subsequent change in the contact angle is obtained by deposition of fluoropolymer films with different thicknesses by a hot wire chemical vapor deposition (HWCVD) method. The deposited film thickness needed to obtain superhydrophobicity was determined. The wettability properties of the produced fluoropolymer–silicon system are analyzed using the Wenzel and Cassie theories.
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Starinskiy S. V. et al. Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition // Journal Physics D: Applied Physics. 2018. Vol. 51. No. 25. p. 255307.
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Starinskiy S. V., Bulgakov A. V., Gatapova E., Shukhov Y. G., Sulyaeva V., Timoshenko N. I., Safonov A. Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition // Journal Physics D: Applied Physics. 2018. Vol. 51. No. 25. p. 255307.
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TY - JOUR
DO - 10.1088/1361-6463/aac641
UR - https://doi.org/10.1088/1361-6463/aac641
TI - Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition
T2 - Journal Physics D: Applied Physics
AU - Starinskiy, Sergey V
AU - Bulgakov, A V
AU - Gatapova, Elizaveta
AU - Shukhov, Yuri G.
AU - Sulyaeva, Veronica
AU - Timoshenko, Nikolay I
AU - Safonov, Alexey
PY - 2018
DA - 2018/06/05
PB - IOP Publishing
SP - 255307
IS - 25
VL - 51
SN - 0022-3727
SN - 1361-6463
ER -
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@article{2018_Starinskiy,
author = {Sergey V Starinskiy and A V Bulgakov and Elizaveta Gatapova and Yuri G. Shukhov and Veronica Sulyaeva and Nikolay I Timoshenko and Alexey Safonov},
title = {Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition},
journal = {Journal Physics D: Applied Physics},
year = {2018},
volume = {51},
publisher = {IOP Publishing},
month = {jun},
url = {https://doi.org/10.1088/1361-6463/aac641},
number = {25},
pages = {255307},
doi = {10.1088/1361-6463/aac641}
}
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MLA
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Starinskiy, Sergey V., et al. “Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition.” Journal Physics D: Applied Physics, vol. 51, no. 25, Jun. 2018, p. 255307. https://doi.org/10.1088/1361-6463/aac641.