Superconductor Science and Technology, volume 21, issue 11, pages 115006
Deposition and characterization of few-nanometers-thick superconducting Mo–Re films
V.A. Seleznev
1
,
M. A. Tarkhov
1
,
B. M. Voronov
1
,
I I Milostnaya
1
,
V Yu Lyakhno
2
,
A S Garbuz
2
,
M.Yu. Mikhailov
2
,
O. M. Zhigalina
3
,
G. N. Gol'tsman
1
2
B Verkin Institute for Low Temperature Physics and Engineering of the National Academyof Sciences of Ukraine (ILTPE), Kharkov 61103,Ukraine
|
Publication type: Journal Article
Publication date: 2008-09-09
Quartile SCImago
Q1
Quartile WOS
Q2
Impact factor: 3.6
ISSN: 09532048, 13616668
Materials Chemistry
Metals and Alloys
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
We report on the fabrication and investigation of few-nanometers-thick superconducting molybdenum–rhenium (Mo–Re) films intended for use in nanowire single-photon superconducting detectors (SSPDs). Mo–Re films were deposited on sapphire substrates by DC magnetron sputtering of an Mo(60)–Re(40) alloy target in an atmosphere of argon. The films 2–10 nm thick had critical temperatures (Tc) from 5.6 to 9.7 K. HRTEM (high-resolution transmission electron microscopy) analysis showed that the films had a homogeneous structure. XPS (x-ray photoelectron spectroscopy) analysis showed the Mo to Re atom ratio to be 0.575/0.425, oxygen concentration to be 10%, and concentration of other elements to be 1%.
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Seleznev V. et al. Deposition and characterization of few-nanometers-thick superconducting Mo–Re films // Superconductor Science and Technology. 2008. Vol. 21. No. 11. p. 115006.
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Seleznev V., Tarkhov M. A., Voronov B. M., Milostnaya I. I., Lyakhno V. Yu., Garbuz A. S., Mikhailov M., Zhigalina O. M., Gol'tsman G. N. Deposition and characterization of few-nanometers-thick superconducting Mo–Re films // Superconductor Science and Technology. 2008. Vol. 21. No. 11. p. 115006.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1088/0953-2048/21/11/115006
UR - https://doi.org/10.1088/0953-2048/21/11/115006
TI - Deposition and characterization of few-nanometers-thick superconducting Mo–Re films
T2 - Superconductor Science and Technology
AU - Seleznev, V.A.
AU - Tarkhov, M. A.
AU - Voronov, B. M.
AU - Milostnaya, I I
AU - Lyakhno, V Yu
AU - Garbuz, A S
AU - Mikhailov, M.Yu.
AU - Zhigalina, O. M.
AU - Gol'tsman, G. N.
PY - 2008
DA - 2008/09/09
PB - IOP Publishing
SP - 115006
IS - 11
VL - 21
SN - 0953-2048
SN - 1361-6668
ER -
Cite this
BibTex
Copy
@article{2008_Seleznev,
author = {V.A. Seleznev and M. A. Tarkhov and B. M. Voronov and I I Milostnaya and V Yu Lyakhno and A S Garbuz and M.Yu. Mikhailov and O. M. Zhigalina and G. N. Gol'tsman},
title = {Deposition and characterization of few-nanometers-thick superconducting Mo–Re films},
journal = {Superconductor Science and Technology},
year = {2008},
volume = {21},
publisher = {IOP Publishing},
month = {sep},
url = {https://doi.org/10.1088/0953-2048/21/11/115006},
number = {11},
pages = {115006},
doi = {10.1088/0953-2048/21/11/115006}
}
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Seleznev, V.A., et al. “Deposition and characterization of few-nanometers-thick superconducting Mo–Re films.” Superconductor Science and Technology, vol. 21, no. 11, Sep. 2008, p. 115006. https://doi.org/10.1088/0953-2048/21/11/115006.
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