IOP Publishing
Nanotechnology
,  volume 21 ,  issue 31 ,  pages 315301

Titania-assisted electron-beam and synchrotron lithography

Publication type: Journal Article
Publication date: 2010-07-15
IOP Publishing
scimago Q2
wos Q2
SJR: 0.597
CiteScore: 6.2
Impact factor: 2.8
ISSN: 09574484, 13616528
General Chemistry
General Materials Science
Electrical and Electronic Engineering
Mechanical Engineering
Bioengineering
Mechanics of Materials
Abstract
Novel imaging layer technology for electron-beam and extreme-ultraviolet lithographic processes based upon generation of Pd nanoparticles in the Pd(2+)-loaded TiO(2) films was developed. The electroless metallization of the patterned TiO(2):Pd(2+) films yields both negative and positive nickel images with resolution down to approximately 100 nm.
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GOST |
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GOST Copy
Sokolov V. G. et al. Titania-assisted electron-beam and synchrotron lithography // Nanotechnology. 2010. Vol. 21. No. 31. p. 315301.
GOST all authors (up to 50) Copy
Skorb E. V., Grützmacher D., Dais C., Guzenko V. A., Sokolov V. N., Gaevskaya T. V., Sviridov D. V. Titania-assisted electron-beam and synchrotron lithography // Nanotechnology. 2010. Vol. 21. No. 31. p. 315301.
RIS |
Cite this
RIS Copy
TY - JOUR
DO - 10.1088/0957-4484/21/31/315301
UR - https://doi.org/10.1088/0957-4484/21/31/315301
TI - Titania-assisted electron-beam and synchrotron lithography
T2 - Nanotechnology
AU - Skorb, Ekaterina V.
AU - Grützmacher, Detlev
AU - Dais, Christian
AU - Guzenko, Vitaliy A.
AU - Sokolov, V. N.
AU - Gaevskaya, Tatjana V
AU - Sviridov, D. V.
PY - 2010
DA - 2010/07/15
PB - IOP Publishing
SP - 315301
IS - 31
VL - 21
PMID - 20634573
SN - 0957-4484
SN - 1361-6528
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2010_Sokolov,
author = {Ekaterina V. Skorb and Detlev Grützmacher and Christian Dais and Vitaliy A. Guzenko and V. N. Sokolov and Tatjana V Gaevskaya and D. V. Sviridov},
title = {Titania-assisted electron-beam and synchrotron lithography},
journal = {Nanotechnology},
year = {2010},
volume = {21},
publisher = {IOP Publishing},
month = {jul},
url = {https://doi.org/10.1088/0957-4484/21/31/315301},
number = {31},
pages = {315301},
doi = {10.1088/0957-4484/21/31/315301}
}
MLA
Cite this
MLA Copy
Sokolov, Valeriy G., et al. “Titania-assisted electron-beam and synchrotron lithography.” Nanotechnology, vol. 21, no. 31, Jul. 2010, p. 315301. https://doi.org/10.1088/0957-4484/21/31/315301.