IOP Publishing
Superconductor Science and Technology
,  volume 37 ,  issue 10 ,  pages 105009

Molybdenum low resistance thin film resistors for cryogenic devices

Publication type: Journal Article
Publication date: 2024-09-02
IOP Publishing
scimago Q1
wos Q2
SJR: 1.095
CiteScore: 6.7
Impact factor: 4.2
ISSN: 09532048, 13616668
Abstract

We present a study of thin-film molybdenum resistors for NbN electronics operating at cryogenic temperatures. The key step is the 0.5-1.5 keV ion cleaning-activation of NbN before Mo deposition which allows to obtain a high-quality Mo/NbN interface which together with additional aluminium bandage layer in the area of contact pads allow to reduce contact resistance below 1 Ω. The quality of the interfaces is confirmed by transmission electron microscopy and X-ray reflectometry.

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GOST Copy
Korneeva Y. P. et al. Molybdenum low resistance thin film resistors for cryogenic devices // Superconductor Science and Technology. 2024. Vol. 37. No. 10. p. 105009.
GOST all authors (up to 50) Copy
Korneeva Y. P., Dryazgov M., Porokhov N. V., Osipov N., Krasilnikov M., Korneev A., Tarkhov M. A. Molybdenum low resistance thin film resistors for cryogenic devices // Superconductor Science and Technology. 2024. Vol. 37. No. 10. p. 105009.
RIS |
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RIS Copy
TY - JOUR
DO - 10.1088/1361-6668/ad6adb
UR - https://iopscience.iop.org/article/10.1088/1361-6668/ad6adb
TI - Molybdenum low resistance thin film resistors for cryogenic devices
T2 - Superconductor Science and Technology
AU - Korneeva, Yu. P.
AU - Dryazgov, M
AU - Porokhov, N V
AU - Osipov, Nikita
AU - Krasilnikov, Maxim
AU - Korneev, A.A.
AU - Tarkhov, M A
PY - 2024
DA - 2024/09/02
PB - IOP Publishing
SP - 105009
IS - 10
VL - 37
SN - 0953-2048
SN - 1361-6668
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2024_Korneeva,
author = {Yu. P. Korneeva and M Dryazgov and N V Porokhov and Nikita Osipov and Maxim Krasilnikov and A.A. Korneev and M A Tarkhov},
title = {Molybdenum low resistance thin film resistors for cryogenic devices},
journal = {Superconductor Science and Technology},
year = {2024},
volume = {37},
publisher = {IOP Publishing},
month = {sep},
url = {https://iopscience.iop.org/article/10.1088/1361-6668/ad6adb},
number = {10},
pages = {105009},
doi = {10.1088/1361-6668/ad6adb}
}
MLA
Cite this
MLA Copy
Korneeva, Yu. P., et al. “Molybdenum low resistance thin film resistors for cryogenic devices.” Superconductor Science and Technology, vol. 37, no. 10, Sep. 2024, p. 105009. https://iopscience.iop.org/article/10.1088/1361-6668/ad6adb.