IOP Publishing
Superconductor Science and Technology
,  том 37 ,  издание 10 ,  страницы 105009

Molybdenum low resistance thin film resistors for cryogenic devices

Тип публикации: Journal Article
Дата публикации: 2024-09-02
IOP Publishing
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SJR: 1.095
CiteScore: 6.7
Impact factor: 4.2
ISSN: 09532048, 13616668
Краткое описание

We present a study of thin-film molybdenum resistors for NbN electronics operating at cryogenic temperatures. The key step is the 0.5-1.5 keV ion cleaning-activation of NbN before Mo deposition which allows to obtain a high-quality Mo/NbN interface which together with additional aluminium bandage layer in the area of contact pads allow to reduce contact resistance below 1 Ω. The quality of the interfaces is confirmed by transmission electron microscopy and X-ray reflectometry.

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Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1, 100%
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
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Korneeva Y. P. et al. Molybdenum low resistance thin film resistors for cryogenic devices // Superconductor Science and Technology. 2024. Vol. 37. No. 10. p. 105009.
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Korneeva Y. P., Dryazgov M., Porokhov N. V., Osipov N., Krasilnikov M., Korneev A., Tarkhov M. A. Molybdenum low resistance thin film resistors for cryogenic devices // Superconductor Science and Technology. 2024. Vol. 37. No. 10. p. 105009.
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TY - JOUR
DO - 10.1088/1361-6668/ad6adb
UR - https://iopscience.iop.org/article/10.1088/1361-6668/ad6adb
TI - Molybdenum low resistance thin film resistors for cryogenic devices
T2 - Superconductor Science and Technology
AU - Korneeva, Yu. P.
AU - Dryazgov, M
AU - Porokhov, N V
AU - Osipov, Nikita
AU - Krasilnikov, Maxim
AU - Korneev, A.A.
AU - Tarkhov, M A
PY - 2024
DA - 2024/09/02
PB - IOP Publishing
SP - 105009
IS - 10
VL - 37
SN - 0953-2048
SN - 1361-6668
ER -
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@article{2024_Korneeva,
author = {Yu. P. Korneeva and M Dryazgov and N V Porokhov and Nikita Osipov and Maxim Krasilnikov and A.A. Korneev and M A Tarkhov},
title = {Molybdenum low resistance thin film resistors for cryogenic devices},
journal = {Superconductor Science and Technology},
year = {2024},
volume = {37},
publisher = {IOP Publishing},
month = {sep},
url = {https://iopscience.iop.org/article/10.1088/1361-6668/ad6adb},
number = {10},
pages = {105009},
doi = {10.1088/1361-6668/ad6adb}
}
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Korneeva, Yu. P., et al. “Molybdenum low resistance thin film resistors for cryogenic devices.” Superconductor Science and Technology, vol. 37, no. 10, Sep. 2024, p. 105009. https://iopscience.iop.org/article/10.1088/1361-6668/ad6adb.