volume 15 issue 5 pages 56001

Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy

D V Shuleiko 1
I. A. Romanov 2
I N Parhomenko 2
A.V. Pavlikov 3, 4
S.V Zabotnov 3, 4, 6
A.G. Kazanskii 1
P. K. Kashkarov 3, 4, 6
Publication typeJournal Article
Publication date2018-03-26
scimago Q3
wos Q3
SJR0.324
CiteScore3.0
Impact factor1.4
ISSN16122011, 1612202X
Physics and Astronomy (miscellaneous)
Instrumentation
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GOST Copy
Shuleiko D. V. et al. Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy // Laser Physics Letters. 2018. Vol. 15. No. 5. p. 56001.
GOST all authors (up to 50) Copy
Shuleiko D. V., Potemkin F. V., Romanov I. A., Parhomenko I. N., Pavlikov A., Presnov D. E., Zabotnov S., Kazanskii A., Kashkarov P. K. Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy // Laser Physics Letters. 2018. Vol. 15. No. 5. p. 56001.
RIS |
Cite this
RIS Copy
TY - JOUR
DO - 10.1088/1612-202X/aaacf9
UR - https://doi.org/10.1088/1612-202X/aaacf9
TI - Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy
T2 - Laser Physics Letters
AU - Shuleiko, D V
AU - Potemkin, F. V.
AU - Romanov, I. A.
AU - Parhomenko, I N
AU - Pavlikov, A.V.
AU - Presnov, Denis E.
AU - Zabotnov, S.V
AU - Kazanskii, A.G.
AU - Kashkarov, P. K.
PY - 2018
DA - 2018/03/26
PB - IOP Publishing
SP - 56001
IS - 5
VL - 15
SN - 1612-2011
SN - 1612-202X
ER -
BibTex |
Cite this
BibTex (up to 50 authors) Copy
@article{2018_Shuleiko,
author = {D V Shuleiko and F. V. Potemkin and I. A. Romanov and I N Parhomenko and A.V. Pavlikov and Denis E. Presnov and S.V Zabotnov and A.G. Kazanskii and P. K. Kashkarov},
title = {Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy},
journal = {Laser Physics Letters},
year = {2018},
volume = {15},
publisher = {IOP Publishing},
month = {mar},
url = {https://doi.org/10.1088/1612-202X/aaacf9},
number = {5},
pages = {56001},
doi = {10.1088/1612-202X/aaacf9}
}
MLA
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MLA Copy
Shuleiko, D. V., et al. “Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy.” Laser Physics Letters, vol. 15, no. 5, Mar. 2018, p. 56001. https://doi.org/10.1088/1612-202X/aaacf9.