Reliable 300 mm Wafer Level Hybrid Bonding for 3D Stacked CMOS Image Sensors
S Lhostis
1
,
A. Farcy
1
,
E Deloffre
1
,
F. Lorut
1
,
S Mermoz
1
,
Y Henrion
1
,
Ludovic Berthier
1
,
F. Bailly
1
,
D. Scevola
1
,
F Guyader
1
,
F Gigon
1
,
C. Besset
1
,
S. Pellissier
1
,
L Gay
1
,
N Hotellier
1
,
A. -L. Le Berrigo
2
,
S. Moreau
2
,
V. Balan
2
,
Frank Fournel
2
,
A. Jouve
2
,
S Cheramy
2
,
M. Arnoux
3
,
Bernhard Rebhan
4
,
G. A. Maier
5
,
L. Chitu
5
1
STMicroelectronics, CROLLES Cedex, France
|
2
CEA, LETI, Grenoble, France
|
3
STMicroelectronics, Crolles, FR
|
4
EV Group, St. Florian/Inn, Austria
|
5
Materials Center Leoben Forschung GmbH (MCL), Leoben, Austria
|
Publication type: Proceedings Article
Publication date: 2016-05-01
—
Abstract
3D Stacked Image sensor is the stacking of a Back-Side Illuminated (BSI) CMOS Image Sensor on a logic die. It enables compact size, higher performances and additional functionalities compared to standard BSI sensors. The highest footprint reduction is obtained with 3D hybrid bonding with metal interconnects between top and bottom tiers. Hybrid bonding process with oxide / copper direct bonding allows the highest scalability of interconnect pitch. In this study we present the morphological and electrical characterizations of a test vehicle. The hybrid bonding of wafers from two different technology nodes is performed using a dual damascene integration for the hybrid bonding level. The main parameters to assess the bonding interface quality are analyzed such as the influence of the pad design, the impact of reworkability and wafer -- to-wafer overlays. The process robustness is studied through reliability tests and electromigration measurements.
Top-30
Citations by journals
|
1
2
3
4
|
|
|
Springer Series in Advanced Microelectronics
4 publications, 6.15%
|
|
|
IEEE Electron Device Letters
3 publications, 4.62%
|
|
|
ECS Journal of Solid State Science and Technology
2 publications, 3.08%
|
|
|
Materials
2 publications, 3.08%
|
|
|
Microelectronics Reliability
2 publications, 3.08%
|
|
|
Sensors
1 publication, 1.54%
|
|
|
Materials Science in Semiconductor Processing
1 publication, 1.54%
|
|
|
InfoMat
1 publication, 1.54%
|
|
|
IEEE Transactions on Electron Devices
1 publication, 1.54%
|
|
|
IEEE Journal of Solid-State Circuits
1 publication, 1.54%
|
|
|
IEEE Transactions on Components, Packaging and Manufacturing Technology
1 publication, 1.54%
|
|
|
Lecture Notes in Electrical Engineering
1 publication, 1.54%
|
|
|
Nanomaterials
1 publication, 1.54%
|
|
|
Russian Chemical Reviews
1 publication, 1.54%
|
|
|
Journal of Electronic Materials
1 publication, 1.54%
|
|
|
1
2
3
4
|
Citations by publishers
|
1
2
3
4
5
6
7
8
9
|
|
|
IEEE
9 publications, 13.85%
|
|
|
Springer Nature
6 publications, 9.23%
|
|
|
Multidisciplinary Digital Publishing Institute (MDPI)
4 publications, 6.15%
|
|
|
Elsevier
3 publications, 4.62%
|
|
|
The Electrochemical Society
2 publications, 3.08%
|
|
|
Wiley
2 publications, 3.08%
|
|
|
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii
1 publication, 1.54%
|
|
|
1
2
3
4
5
6
7
8
9
|
- We do not take into account publications without a DOI.
- Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
- Statistics recalculated weekly.
{"yearsCitations":{"type":"bar","data":{"show":true,"labels":[2016,2017,2018,2019,2020,2021,2022,2023,2024],"ids":[0,0,0,0,0,0,0,0,0],"codes":[0,0,0,0,0,0,0,0,0],"imageUrls":["","","","","","","","",""],"datasets":[{"label":"Citations number","data":[6,7,7,13,9,7,5,7,4],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":["9.23","10.77","10.77","20","13.85","10.77","7.69","10.77","6.15"],"barThickness":null}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"journals":{"type":"bar","data":{"show":true,"labels":["Springer Series in Advanced Microelectronics","IEEE Electron Device Letters","ECS Journal of Solid State Science and Technology","Materials","Microelectronics Reliability","Sensors","Materials Science in Semiconductor Processing","InfoMat","IEEE Transactions on Electron Devices","IEEE Journal of Solid-State Circuits","IEEE Transactions on Components, Packaging and Manufacturing Technology","Lecture Notes in Electrical Engineering","Nanomaterials","Russian Chemical Reviews","Journal of Electronic Materials"],"ids":[15671,5727,8890,25198,894,18435,8329,25964,25183,14336,20398,12330,10051,23802,18295],"codes":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/s6nfxitVCZUsdJiJZESaAXqdmMJxom8q4Ps6ayL2_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/9Mus3KG1Tkd7Bwaurt8H3RwWh0CxRlGoO6ng9UK1_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp"],"datasets":[{"label":"","data":[4,3,2,2,2,1,1,1,1,1,1,1,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[6.15,4.62,3.08,3.08,3.08,1.54,1.54,1.54,1.54,1.54,1.54,1.54,1.54,1.54,1.54],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Journals","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"publishers":{"type":"bar","data":{"show":true,"labels":["IEEE","Springer Nature","Multidisciplinary Digital Publishing Institute (MDPI)","Elsevier","The Electrochemical Society","Wiley","Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii"],"ids":[6953,8,202,17,6916,11,9422],"codes":[0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/s6nfxitVCZUsdJiJZESaAXqdmMJxom8q4Ps6ayL2_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/9Mus3KG1Tkd7Bwaurt8H3RwWh0CxRlGoO6ng9UK1_medium.webp"],"datasets":[{"label":"","data":[9,6,4,3,2,2,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[13.85,9.23,6.15,4.62,3.08,3.08,1.54],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Publishers","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"yearsCitationsQuartiles":{"type":"bar","data":{"show":true,"labels":[2016,2017,2018,2019,2020,2021,2022,2023,2024],"ids":[],"codes":[],"imageUrls":[],"datasets":[{"label":"Q4","backgroundColor":"rgb(221,90,78)","data":[0,0,0,0,0,0,0,1,0],"percentage":["0","0","0","0","0","0","0","1.54","0"]},{"label":"Q3","backgroundColor":"rgb(251, 163,83)","data":[0,0,0,0,1,1,0,0,1],"percentage":["0","0","0","0","1.54","1.54","0","0","1.54"]},{"label":"Q2","backgroundColor":"rgb(232, 213, 89)","data":[0,0,0,1,1,0,0,3,1],"percentage":["0","0","0","1.54","1.54","0","0","4.62","1.54"]},{"label":"Q1","backgroundColor":"rgb(164, 207, 99)","data":[0,1,0,2,0,3,1,1,1],"percentage":["0","1.54","0","3.08","0","4.62","1.54","1.54","1.54"]},{"label":"Quartile not defined","backgroundColor":"#E5E7EB","data":[6,6,7,10,7,3,4,2,1],"percentage":["9.23","9.23","10.77","15.38","10.77","4.62","6.15","3.08","1.54"]}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations quartiles by SCImago per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"yearsCitationsQuartilesWs":{"type":"bar","data":{"show":true,"labels":[2016,2017,2018,2019,2020,2021,2022,2023,2024],"ids":[],"codes":[],"imageUrls":[],"datasets":[{"label":"Q4","backgroundColor":"rgb(221,90,78)","data":[0,0,0,0,0,0,0,2,0],"percentage":["0","0","0","0","0","0","0","3.08","0"]},{"label":"Q3","backgroundColor":"rgb(251, 163,83)","data":[0,0,0,0,2,1,0,0,1],"percentage":["0","0","0","0","3.08","1.54","0","0","1.54"]},{"label":"Q2","backgroundColor":"rgb(232, 213, 89)","data":[0,1,0,2,0,2,1,1,1],"percentage":["0","1.54","0","3.08","0","3.08","1.54","1.54","1.54"]},{"label":"Q1","backgroundColor":"rgb(164, 207, 99)","data":[0,0,0,1,0,1,0,1,1],"percentage":["0","0","0","1.54","0","1.54","0","1.54","1.54"]},{"label":"Quartile not defined","backgroundColor":"#E5E7EB","data":[6,6,7,10,7,3,4,3,1],"percentage":["9.23","9.23","10.77","15.38","10.77","4.62","6.15","4.62","1.54"]}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations quartiles by WoS per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}}}
Are you a researcher?
Create a profile to get free access to personal recommendations for colleagues and new articles.
Profiles