The Scaling of Cu-Cu Hybrid Bonding For High Density 3D Chip Stacking
Y KAGAWA
1
,
S Hida
1
,
Yuka Kobayashi
1
,
K. Takahashi
1
,
S Miyanomae
1
,
M. Kawamura
1
,
H. Kawashima
2
,
H Yamagishi
2
,
Takaya Hirano
2
,
K. Tatani
2
,
Hiroki Nakayama
1
,
K. Ohno
2
,
H. Iwamoto
2
,
S. Kadomura
1
1
Sony Semiconductor Manufacturing Corporation, Japan
|
2
Sony Semiconductor Solutions Corporation, Japan
|
Publication type: Proceedings Article
Publication date: 2019-03-01
—
Abstract
We have successfully improved the scaling of Cu-Cu hybrid bonding. In this study, 3 um-pitch and 3M Cu-Cu connections with sufficient electrical properties and reliabilities were achieved. The ultra-fine pitch Cu-Cu connections correspond to the 0.75x scaling of conventional Cu-Cu hybrid bonding that we previously reported. Our high density 3D chip stacking technology is expected to enhance not only the function of back-illuminated CMOS image sensors (BI-CIS) but also that of coming 3D stacked semiconductor devices.
Top-30
Citations by journals
1
2
|
|
IEEE Transactions on Electron Devices
2 publications, 9.52%
|
|
Journal of Electronic Packaging, Transactions of the ASME
2 publications, 9.52%
|
|
Journal of the Indian Institute of Science
1 publication, 4.76%
|
|
IEEE Transactions on Components, Packaging and Manufacturing Technology
1 publication, 4.76%
|
|
IEICE ESS FUNDAMENTALS REVIEW
1 publication, 4.76%
|
|
Materials
1 publication, 4.76%
|
|
Nanomaterials
1 publication, 4.76%
|
|
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
1 publication, 4.76%
|
|
Russian Chemical Reviews
1 publication, 4.76%
|
|
1
2
|
Citations by publishers
1
2
3
4
5
6
7
8
9
|
|
IEEE
9 publications, 42.86%
|
|
Multidisciplinary Digital Publishing Institute (MDPI)
2 publications, 9.52%
|
|
ASME
2 publications, 9.52%
|
|
Springer Nature
1 publication, 4.76%
|
|
Institute of Electronics, Information and Communications Engineers (IEICE)
1 publication, 4.76%
|
|
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii
1 publication, 4.76%
|
|
1
2
3
4
5
6
7
8
9
|
- We do not take into account publications without a DOI.
- Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
- Statistics recalculated weekly.
{"yearsCitations":{"type":"bar","data":{"show":true,"labels":[2019,2020,2021,2022,2023,2024],"ids":[0,0,0,0,0,0],"codes":[0,0,0,0,0,0],"imageUrls":["","","","","",""],"datasets":[{"label":"Citations number","data":[1,2,1,5,6,6],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":["4.76","9.52","4.76","23.81","28.57","28.57"],"barThickness":null}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"journals":{"type":"bar","data":{"show":true,"labels":["IEEE Transactions on Electron Devices","Journal of Electronic Packaging, Transactions of the ASME","Journal of the Indian Institute of Science","IEEE Transactions on Components, Packaging and Manufacturing Technology","IEICE ESS FUNDAMENTALS REVIEW","Materials","Nanomaterials","IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","Russian Chemical Reviews"],"ids":[25183,3440,19962,20398,40137,25198,10051,19603,23802],"codes":[0,0,0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/yKbGpvfNleUTiwBfKt4XcIFlZMo3HgWv1KKVqn4g_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/9Mus3KG1Tkd7Bwaurt8H3RwWh0CxRlGoO6ng9UK1_medium.webp"],"datasets":[{"label":"","data":[2,2,1,1,1,1,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[9.52,9.52,4.76,4.76,4.76,4.76,4.76,4.76,4.76],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Journals","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"publishers":{"type":"bar","data":{"show":true,"labels":["IEEE","Multidisciplinary Digital Publishing Institute (MDPI)","ASME","Springer Nature","Institute of Electronics, Information and Communications Engineers (IEICE)","Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii"],"ids":[6953,202,6977,8,8617,9422],"codes":[0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/yKbGpvfNleUTiwBfKt4XcIFlZMo3HgWv1KKVqn4g_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","","\/storage\/images\/resized\/9Mus3KG1Tkd7Bwaurt8H3RwWh0CxRlGoO6ng9UK1_medium.webp"],"datasets":[{"label":"","data":[9,2,2,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[42.86,9.52,9.52,4.76,4.76,4.76],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Publishers","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"yearsCitationsQuartiles":{"type":"bar","data":{"show":true,"labels":[2019,2020,2021,2022,2023,2024],"ids":[],"codes":[],"imageUrls":[],"datasets":[{"label":"Q4","backgroundColor":"rgb(221,90,78)","data":[0,0,0,0,0,0],"percentage":["0","0","0","0","0","0"]},{"label":"Q3","backgroundColor":"rgb(251, 163,83)","data":[0,0,0,0,0,0],"percentage":["0","0","0","0","0","0"]},{"label":"Q2","backgroundColor":"rgb(232, 213, 89)","data":[0,1,0,1,2,2],"percentage":["0","4.76","0","4.76","9.52","9.52"]},{"label":"Q1","backgroundColor":"rgb(164, 207, 99)","data":[0,0,0,1,1,2],"percentage":["0","0","0","4.76","4.76","9.52"]},{"label":"Quartile not defined","backgroundColor":"#E5E7EB","data":[1,1,1,3,3,2],"percentage":["4.76","4.76","4.76","14.29","14.29","9.52"]}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations quartiles by SCImago per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"yearsCitationsQuartilesWs":{"type":"bar","data":{"show":true,"labels":[2019,2020,2021,2022,2023,2024],"ids":[],"codes":[],"imageUrls":[],"datasets":[{"label":"Q4","backgroundColor":"rgb(221,90,78)","data":[0,0,0,0,0,2],"percentage":["0","0","0","0","0","9.52"]},{"label":"Q3","backgroundColor":"rgb(251, 163,83)","data":[0,1,0,1,0,0],"percentage":["0","4.76","0","4.76","0","0"]},{"label":"Q2","backgroundColor":"rgb(232, 213, 89)","data":[0,0,0,1,2,1],"percentage":["0","0","0","4.76","9.52","4.76"]},{"label":"Q1","backgroundColor":"rgb(164, 207, 99)","data":[0,0,0,0,1,1],"percentage":["0","0","0","0","4.76","4.76"]},{"label":"Quartile not defined","backgroundColor":"#E5E7EB","data":[1,1,1,3,3,2],"percentage":["4.76","4.76","4.76","14.29","14.29","9.52"]}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations quartiles by WoS per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}}}
Are you a researcher?
Create a profile to get free access to personal recommendations for colleagues and new articles.