Anisotropic Texturing Amorphous Silicon Thin Films by Femtosecond Laser Irradiation

S V Zabotnov 1
, 
D V Shuleiko 1
, 
M. N. Martyshov 1
, 
D E Presnov 1
, 
L. A. Golovan 1
, 
P. K. Kashkarov 1
1
 
Publication type: Proceedings Article
Publication date: 2022-06-20
Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Femtosecond laser treatment allows to fabricate periodic structures at amorphous hydrogenated silicon surfaces on areas more than a square millimeter. The period of the structures is near the laser wavelength and determines by the nonequilibrium electrons concentration at high power laser excitation. The obtained structures possess a pronounced electrophysical anisotropy.
Found 

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