Anisotropic Texturing Amorphous Silicon Thin Films by Femtosecond Laser Irradiation

S V Zabotnov 1
, 
D V Shuleiko 1
, 
M. N. Martyshov 1
, 
D E Presnov 1
, 
L. A. Golovan 1
, 
P. K. Kashkarov 1
1
 
Publication type: Proceedings Article
Publication date: 2022-06-20
Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Femtosecond laser treatment allows to fabricate periodic structures at amorphous hydrogenated silicon surfaces on areas more than a square millimeter. The period of the structures is near the laser wavelength and determines by the nonequilibrium electrons concentration at high power laser excitation. The obtained structures possess a pronounced electrophysical anisotropy.
Found 

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Zabotnov S. V. et al. Anisotropic Texturing Amorphous Silicon Thin Films by Femtosecond Laser Irradiation // 2022 International Conference Laser Optics, ICLO 2022 - Proceedingss. 2022.
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Zabotnov S. V., Shuleiko D. V., Martyshov M. N., Presnov D. E., Golovan L. A., Kashkarov P. K. Anisotropic Texturing Amorphous Silicon Thin Films by Femtosecond Laser Irradiation // 2022 International Conference Laser Optics, ICLO 2022 - Proceedingss. 2022.
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TY - CPAPER
DO - 10.1109/ICLO54117.2022.9840223
UR - https://doi.org/10.1109/ICLO54117.2022.9840223
TI - Anisotropic Texturing Amorphous Silicon Thin Films by Femtosecond Laser Irradiation
T2 - 2022 International Conference Laser Optics, ICLO 2022 - Proceedingss
AU - Zabotnov, S V
AU - Shuleiko, D V
AU - Martyshov, M. N.
AU - Presnov, D E
AU - Golovan, L. A.
AU - Kashkarov, P. K.
PY - 2022
DA - 2022/06/20
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -
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@inproceedings{2022_Zabotnov,
author = {S V Zabotnov and D V Shuleiko and M. N. Martyshov and D E Presnov and L. A. Golovan and P. K. Kashkarov},
title = {Anisotropic Texturing Amorphous Silicon Thin Films by Femtosecond Laser Irradiation},
year = {2022},
month = {jun},
publisher = {Institute of Electrical and Electronics Engineers (IEEE)}
}
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