$1.62\mu \mathrm{m}$ Global Shutter Quantum Dot Image Sensor Optimized for Near and Shortwave Infrared

J S Steckel ¹

Josse E ²

A. G. Pattantyus-Abraham ³

M Bidaud ²

B. Mortini ²

H Bilgen ²

O. Arnaud ²

S Allegret Maret ²

F Saguin ²

L. Mazet ²

S Lhostis ²

T. Berger ²

K Haxaire ²

L-L. Chapelon ²

L Parmigiani ²

Pascal Gouraud ²

M. Brihoum ²

P Bar ²

M Guillermet ⁴

S Favreau ²

Duru R ²

J Fantuz ²

S Ricq ²

D NEY ²

I Hammad ²

D. Roy ²

A. ARNAUD ²

B Vianne ²

G. Nayak ²

N Virollet ²

V Farys ²

P. Malinge ²

A Tournier ²

F. Lalanne ²

A. Crocherie ²

J Galvier ²

S Rabary ²

O. Noblanc ²

H Wehbe-Alause ²

S. ACHARYA ³

Ajay Singh ³

J Meitzner ³

D Aher ³

H. Yang ³

J Romero ³

B Chen ⁵

C. Hsu ⁵

K.-C. Cheng ⁵

Y. Chang ⁵

M SARMIENTO ³

C. Grange ¹

E Mazaleyrat ¹

K. Rochereau ¹

Hide authors affiliations Show authors affiliations: 5 affiliations

STMicroelectronics, Analog, MEMS & Sensors Group, Imaging,Grenoble,France |

STMicroelectronics, Digital FMT, Technology for Optical Sensors,Crolles,France |

STMicroelectronics, Digital FMT. Technology for Ontical Sensors,Fremont/Santa Clara,CA,USA |

⁴

CEA-LETI, Digital FMT, Technology for Optical Sensors,Crolles,France |

⁵

STMicroelectronics, Digital FMT, Technology for Optical Sensors,Hsinchu,Taiwan |

Publication type: Proceedings Article

Publication date: 2021-12-11

—

DOI: 10.1109/IEDM19574.2021.9720560

Copy DOI

Abstract

We have developed a $1.62\mu \mathrm{m}$ pixel pitch global shutter sensor optimized for imaging in the near infrared (NIR) and shortwave infrared (SWIR) regions of the light spectrum. This breakthrough was made possible through the use of our colloidal Quantum Dot (QD) thin film technology, which we have named Quantum Film (QF). We have scaled up this new platform technology to our 300mm manufacturing toolset. The challenges associated with the introduction of solution-processed, colloidally grown lead sulfide (PbS) QDs in an industrial 300mm fab environment were successfully overcome. The QF photodiodes, leveraging either NIR or SWIR sensitive QDs, were optimized for high quantum efficiency (QE), low dark current and immunity to operating stress. Global shutter pixel arrays, with pixel pitch of $2.2\mu \mathrm{m}$ and $1.62\mu \mathrm{m}$ exhibit unprecedented QE of >50% and MTF @ Nyquist/2 of 0.75 and 0.6, respectively. The robustness of our 300mm Quantum Film technology was fully assessed and reliability in terms of meeting all required lifetime specifications for consumer electronics and other potential applications has been demonstrated.

By date By citations

Top-30

Citations by journals

	1 2 3
IEEE Transactions on Electron Devices	IEEE Transactions on Electron Devices, 3, 9.09% IEEE Transactions on Electron Devices 3 publications, 9.09%
Journal of Physical Chemistry C	Journal of Physical Chemistry C, 3, 9.09% Journal of Physical Chemistry C 3 publications, 9.09%
Sensors	Sensors, 3, 9.09% Sensors 3 publications, 9.09%
Chemistry of Materials	Chemistry of Materials, 2, 6.06% Chemistry of Materials 2 publications, 6.06%
Nano Letters	Nano Letters, 2, 6.06% Nano Letters 2 publications, 6.06%
ACS Photonics	ACS Photonics, 2, 6.06% ACS Photonics 2 publications, 6.06%
Nano Research	Nano Research, 2, 6.06% Nano Research 2 publications, 6.06%
Applied Physics Letters	Applied Physics Letters, 1, 3.03% Applied Physics Letters 1 publication, 3.03%
Coatings	Coatings, 1, 3.03% Coatings 1 publication, 3.03%
Journal of the Society for Information Display	Journal of the Society for Information Display, 1, 3.03% Journal of the Society for Information Display 1 publication, 3.03%
Angewandte Chemie	Angewandte Chemie, 1, 3.03% Angewandte Chemie 1 publication, 3.03%
Angewandte Chemie - International Edition	Angewandte Chemie - International Edition, 1, 3.03% Angewandte Chemie - International Edition 1 publication, 3.03%
ACS Applied Electronic Materials	ACS Applied Electronic Materials, 1, 3.03% ACS Applied Electronic Materials 1 publication, 3.03%
Advanced Materials	Advanced Materials, 1, 3.03% Advanced Materials 1 publication, 3.03%
Solid-State Electronics	Solid-State Electronics, 1, 3.03% Solid-State Electronics 1 publication, 3.03%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1, 3.03% Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 1 publication, 3.03%
Russian Chemical Reviews	Russian Chemical Reviews, 1, 3.03% Russian Chemical Reviews 1 publication, 3.03%
ACS applied materials & interfaces	ACS applied materials & interfaces, 1, 3.03% ACS applied materials & interfaces 1 publication, 3.03%
Nano Futures	Nano Futures, 1, 3.03% Nano Futures 1 publication, 3.03%
Nanomaterials	Nanomaterials, 1, 3.03% Nanomaterials 1 publication, 3.03%
	1 2 3

Citations by publishers

	2 4 6 8 10 12
American Chemical Society (ACS)	American Chemical Society (ACS), 11, 33.33% American Chemical Society (ACS) 11 publications, 33.33%
Multidisciplinary Digital Publishing Institute (MDPI)	Multidisciplinary Digital Publishing Institute (MDPI), 5, 15.15% Multidisciplinary Digital Publishing Institute (MDPI) 5 publications, 15.15%
Wiley	Wiley, 4, 12.12% Wiley 4 publications, 12.12%
IEEE	IEEE, 3, 9.09% IEEE 3 publications, 9.09%
Springer Nature	Springer Nature, 2, 6.06% Springer Nature 2 publications, 6.06%
SPIE	SPIE, 2, 6.06% SPIE 2 publications, 6.06%
American Institute of Physics (AIP)	American Institute of Physics (AIP), 1, 3.03% American Institute of Physics (AIP) 1 publication, 3.03%
Elsevier	Elsevier, 1, 3.03% Elsevier 1 publication, 3.03%
American Vacuum Society	American Vacuum Society, 1, 3.03% American Vacuum Society 1 publication, 3.03%
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii	Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii, 1, 3.03% Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii 1 publication, 3.03%
IOP Publishing	IOP Publishing, 1, 3.03% IOP Publishing 1 publication, 3.03%
	2 4 6 8 10 12

We do not take into account publications without a DOI.
Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
Statistics recalculated weekly.

{"yearsCitations":{"type":"bar","data":{"show":true,"labels":[2022,2023,2024],"ids":[0,0,0],"codes":[0,0,0],"imageUrls":["","",""],"datasets":[{"label":"Citations number","data":[6,13,14],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6"],"percentage":["18.18","39.39","42.42"],"barThickness":null}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"journals":{"type":"bar","data":{"show":true,"labels":["IEEE Transactions on Electron Devices","Journal of Physical Chemistry C","Sensors","Chemistry of Materials","Nano Letters","ACS Photonics","Nano Research","Applied Physics Letters","Coatings","Journal of the Society for Information Display","Angewandte Chemie","Angewandte Chemie - International Edition","ACS Applied Electronic Materials","Advanced Materials","Solid-State Electronics","Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films","Russian Chemical Reviews","ACS applied materials & interfaces","Nano Futures","Nanomaterials"],"ids":[25183,8859,18435,6428,10312,12730,12211,4202,24427,23447,25450,19215,26454,25159,4338,5463,23802,1458,9297,10051],"codes":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","\/storage\/images\/resized\/ARM4e6URKRsbRZvIF0vFis9DjxGloBjnBYJXbHmZ_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/ARM4e6URKRsbRZvIF0vFis9DjxGloBjnBYJXbHmZ_medium.webp","\/storage\/images\/resized\/9Mus3KG1Tkd7Bwaurt8H3RwWh0CxRlGoO6ng9UK1_medium.webp","\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp"],"datasets":[{"label":"","data":[3,3,3,2,2,2,2,1,1,1,1,1,1,1,1,1,1,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[9.09,9.09,9.09,6.06,6.06,6.06,6.06,3.03,3.03,3.03,3.03,3.03,3.03,3.03,3.03,3.03,3.03,3.03,3.03,3.03],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Journals","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"publishers":{"type":"bar","data":{"show":true,"labels":["American Chemical Society (ACS)","Multidisciplinary Digital Publishing Institute (MDPI)","Wiley","IEEE","Springer Nature","SPIE","American Institute of Physics (AIP)","Elsevier","American Vacuum Society","Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii","IOP Publishing"],"ids":[40,202,11,6953,8,7162,250,17,4511,9422,2075],"codes":[0,0,0,0,0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/iLiQsFqFaSEx6chlGQ5fbAwF6VYU3WWa08hkss0g_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/bRyGpdm98BkAUYiK1YFNpl5Z7hPu6Gd87gbIeuG3_medium.webp","\/storage\/images\/resized\/6scCJegesojp2jubwY3uKCzTAmgsaH2GIFlg6Hfk_medium.webp","\/storage\/images\/resized\/voXLqlsvTwv5p3iMQ8Dhs95nqB4AXOG7Taj7G4ra_medium.webp","\/storage\/images\/resized\/DBpVkewJngs3BK2gVqHayOcCZf2Czbxddw6ObU26_medium.webp","\/storage\/images\/resized\/ARM4e6URKRsbRZvIF0vFis9DjxGloBjnBYJXbHmZ_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/uCIAsivcf0PwzbBKNlcVk4osRd48viDZSveDRvyx_medium.webp","\/storage\/images\/resized\/9Mus3KG1Tkd7Bwaurt8H3RwWh0CxRlGoO6ng9UK1_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp"],"datasets":[{"label":"","data":[11,5,4,3,2,2,1,1,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[33.33,15.15,12.12,9.09,6.06,6.06,3.03,3.03,3.03,3.03,3.03],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":false}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Publishers","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"yearsCitationsQuartiles":{"type":"bar","data":{"show":true,"labels":[2022,2023,2024],"ids":[],"codes":[],"imageUrls":[],"datasets":[{"label":"Q4","backgroundColor":"rgb(221,90,78)","data":[0,0,0],"percentage":["0","0","0"]},{"label":"Q3","backgroundColor":"rgb(251, 163,83)","data":[0,0,0],"percentage":["0","0","0"]},{"label":"Q2","backgroundColor":"rgb(232, 213, 89)","data":[3,2,3],"percentage":["9.09","6.06","9.09"]},{"label":"Q1","backgroundColor":"rgb(164, 207, 99)","data":[2,11,9],"percentage":["6.06","33.33","27.27"]},{"label":"Quartile not defined","backgroundColor":"#E5E7EB","data":[1,0,2],"percentage":["3.03","0","6.06"]}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations quartiles by SCImago per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"yearsCitationsQuartilesWs":{"type":"bar","data":{"show":true,"labels":[2022,2023,2024],"ids":[],"codes":[],"imageUrls":[],"datasets":[{"label":"Q4","backgroundColor":"rgb(221,90,78)","data":[0,0,0],"percentage":["0","0","0"]},{"label":"Q3","backgroundColor":"rgb(251, 163,83)","data":[1,0,2],"percentage":["3.03","0","6.06"]},{"label":"Q2","backgroundColor":"rgb(232, 213, 89)","data":[3,8,2],"percentage":["9.09","24.24","6.06"]},{"label":"Q1","backgroundColor":"rgb(164, 207, 99)","data":[1,4,8],"percentage":["3.03","12.12","24.24"]},{"label":"Quartile not defined","backgroundColor":"#E5E7EB","data":[1,1,2],"percentage":["3.03","3.03","6.06"]}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"},"stacked":true}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations quartiles by WoS per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}}}

Are you a researcher?

Create a profile to get free access to personal recommendations for colleagues and new articles.

Metrics

Found error?

Publisher

—