Institute of Electrical and Electronics Engineers (IEEE)

$1.62\mu \mathrm{m}$ Global Shutter Quantum Dot Image Sensor Optimized for Near and Shortwave Infrared

J S Steckel ¹

Josse E ²

A. G. Pattantyus-Abraham ³

M Bidaud ²

B. Mortini ²

H Bilgen ²

O. Arnaud ²

S Allegret Maret ²

F Saguin ²

L. Mazet ²

S Lhostis ²

T. Berger ²

K Haxaire ²

L-L. Chapelon ²

L Parmigiani ²

Pascal Gouraud ²

M. Brihoum ²

P Bar ²

M Guillermet ⁴

S Favreau ²

Duru R ²

J Fantuz ²

S Ricq ²

D NEY ²

I Hammad ²

D. Roy ²

A. ARNAUD ²

B Vianne ²

G. Nayak ²

N Virollet ²

V Farys ²

P. Malinge ²

A Tournier ²

F. Lalanne ²

A. Crocherie ²

J Galvier ²

S Rabary ²

O. Noblanc ²

H Wehbe-Alause ²

S. ACHARYA ³

Ajay Singh ³

J Meitzner ³

D Aher ³

H. Yang ³

J Romero ³

B Chen ⁵

C. Hsu ⁵

K.-C. Cheng ⁵

Y. Chang ⁵

M SARMIENTO ³

C. Grange ¹

E Mazaleyrat ¹

K. Rochereau ¹

Скрыть аффилиации авторов Показать аффилиации авторов: 5 аффилиаций

STMicroelectronics, Analog, MEMS & Sensors Group, Imaging,Grenoble,France |

STMicroelectronics, Digital FMT, Technology for Optical Sensors,Crolles,France |

STMicroelectronics, Digital FMT. Technology for Ontical Sensors,Fremont/Santa Clara,CA,USA |

⁴

CEA-LETI, Digital FMT, Technology for Optical Sensors,Crolles,France |

⁵

STMicroelectronics, Digital FMT, Technology for Optical Sensors,Hsinchu,Taiwan |

Тип публикации: Proceedings Article

Дата публикации: 2021-12-11

Institute of Electrical and Electronics Engineers (IEEE)

DOI: 10.1109/IEDM19574.2021.9720560

Скопировать DOI

Краткое описание

We have developed a $1.62\mu \mathrm{m}$ pixel pitch global shutter sensor optimized for imaging in the near infrared (NIR) and shortwave infrared (SWIR) regions of the light spectrum. This breakthrough was made possible through the use of our colloidal Quantum Dot (QD) thin film technology, which we have named Quantum Film (QF). We have scaled up this new platform technology to our 300mm manufacturing toolset. The challenges associated with the introduction of solution-processed, colloidally grown lead sulfide (PbS) QDs in an industrial 300mm fab environment were successfully overcome. The QF photodiodes, leveraging either NIR or SWIR sensitive QDs, were optimized for high quantum efficiency (QE), low dark current and immunity to operating stress. Global shutter pixel arrays, with pixel pitch of $2.2\mu \mathrm{m}$ and $1.62\mu \mathrm{m}$ exhibit unprecedented QE of >50% and MTF @ Nyquist/2 of 0.75 and 0.6, respectively. The robustness of our 300mm Quantum Film technology was fully assessed and reliability in terms of meeting all required lifetime specifications for consumer electronics and other potential applications has been demonstrated.

Найдено

2 цитирования

Попов Виктор

к.х.н.

36 публикаций, 202 цитирования

Индекс Хирша: 8

Московский физико-технический институт

Области научных интересов

Gas sensors

Наноматериалы

Полупроводники

1 цитирование

Гехринг Паскал

54 публикации, 1 727 цитирований, 19 рецензий

Индекс Хирша: 22

Лувенский католический университет

Оксфордский университет

Международный микроэлектронный научно-исследовательский центр

Топ-30

Журналы

	1 2 3 4 5 6
Sensors	Sensors, 6, 12.24% Sensors 6 публикаций, 12.24%
Chemistry of Materials	Chemistry of Materials, 3, 6.12% Chemistry of Materials 3 публикации, 6.12%
IEEE Transactions on Electron Devices	IEEE Transactions on Electron Devices, 3, 6.12% IEEE Transactions on Electron Devices 3 публикации, 6.12%
Journal of Physical Chemistry C	Journal of Physical Chemistry C, 3, 6.12% Journal of Physical Chemistry C 3 публикации, 6.12%
Nano Research	Nano Research, 3, 6.12% Nano Research 3 публикации, 6.12%
Nano Letters	Nano Letters, 2, 4.08% Nano Letters 2 публикации, 4.08%
ACS Photonics	ACS Photonics, 2, 4.08% ACS Photonics 2 публикации, 4.08%
Journal of Communications Technology and Electronics	Journal of Communications Technology and Electronics, 2, 4.08% Journal of Communications Technology and Electronics 2 публикации, 4.08%
Applied Physics Letters	Applied Physics Letters, 1, 2.04% Applied Physics Letters 1 публикация, 2.04%
Coatings	Coatings, 1, 2.04% Coatings 1 публикация, 2.04%
Journal of the Society for Information Display	Journal of the Society for Information Display, 1, 2.04% Journal of the Society for Information Display 1 публикация, 2.04%
Angewandte Chemie	Angewandte Chemie, 1, 2.04% Angewandte Chemie 1 публикация, 2.04%
Angewandte Chemie - International Edition	Angewandte Chemie - International Edition, 1, 2.04% Angewandte Chemie - International Edition 1 публикация, 2.04%
ACS Applied Electronic Materials	ACS Applied Electronic Materials, 1, 2.04% ACS Applied Electronic Materials 1 публикация, 2.04%
Advanced Materials	Advanced Materials, 1, 2.04% Advanced Materials 1 публикация, 2.04%
Solid-State Electronics	Solid-State Electronics, 1, 2.04% Solid-State Electronics 1 публикация, 2.04%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1, 2.04% Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 1 публикация, 2.04%
Russian Chemical Reviews	Russian Chemical Reviews, 1, 2.04% Russian Chemical Reviews 1 публикация, 2.04%
ACS applied materials & interfaces	ACS applied materials & interfaces, 1, 2.04% ACS applied materials & interfaces 1 публикация, 2.04%
Nano Futures	Nano Futures, 1, 2.04% Nano Futures 1 публикация, 2.04%
Nanomaterials	Nanomaterials, 1, 2.04% Nanomaterials 1 публикация, 2.04%
Materials	Materials, 1, 2.04% Materials 1 публикация, 2.04%
IEEE Journal of the Electron Devices Society	IEEE Journal of the Electron Devices Society, 1, 2.04% IEEE Journal of the Electron Devices Society 1 публикация, 2.04%
IEEE Photonics Journal	IEEE Photonics Journal, 1, 2.04% IEEE Photonics Journal 1 публикация, 2.04%
ACS Nano	ACS Nano, 1, 2.04% ACS Nano 1 публикация, 2.04%
Chinese Science Bulletin (Chinese Version)	Chinese Science Bulletin (Chinese Version), 1, 2.04% Chinese Science Bulletin (Chinese Version) 1 публикация, 2.04%
	1 2 3 4 5 6

Издатели

	2 4 6 8 10 12 14
American Chemical Society (ACS)	American Chemical Society (ACS), 13, 26.53% American Chemical Society (ACS) 13 публикаций, 26.53%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 9, 18.37% Institute of Electrical and Electronics Engineers (IEEE) 9 публикаций, 18.37%
MDPI	MDPI, 9, 18.37% MDPI 9 публикаций, 18.37%
Wiley	Wiley, 5, 10.2% Wiley 5 публикаций, 10.2%
Springer Nature	Springer Nature, 2, 4.08% Springer Nature 2 публикации, 4.08%
SPIE-Intl Soc Optical Eng	SPIE-Intl Soc Optical Eng, 2, 4.08% SPIE-Intl Soc Optical Eng 2 публикации, 4.08%
Pleiades Publishing	Pleiades Publishing, 2, 4.08% Pleiades Publishing 2 публикации, 4.08%
AIP Publishing	AIP Publishing, 1, 2.04% AIP Publishing 1 публикация, 2.04%
Elsevier	Elsevier, 1, 2.04% Elsevier 1 публикация, 2.04%
American Vacuum Society	American Vacuum Society, 1, 2.04% American Vacuum Society 1 публикация, 2.04%
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii	Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii, 1, 2.04% Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii 1 публикация, 2.04%
IOP Publishing	IOP Publishing, 1, 2.04% IOP Publishing 1 публикация, 2.04%
Tsinghua University Press	Tsinghua University Press, 1, 2.04% Tsinghua University Press 1 публикация, 2.04%
Science in China Press	Science in China Press, 1, 2.04% Science in China Press 1 публикация, 2.04%
	2 4 6 8 10 12 14

Мы не учитываем публикации, у которых нет DOI.
Статистика публикаций обновляется еженедельно.

Вы ученый?

Создайте профиль, чтобы получать персональные рекомендации коллег, конференций и новых статей.

Войти с ORCID

Метрики

Издатель

Institute of Electrical and Electronics Engineers (IEEE)