Density Measurement of a Thin-Film by the Pressure-of-Flotation Method
Тип публикации: Journal Article
Дата публикации: 2005-04-01
scimago Q1
wos Q1
БС1
SJR: 1.471
CiteScore: 10.1
Impact factor: 5.9
ISSN: 00189456, 15579662
Electrical and Electronic Engineering
Instrumentation
Краткое описание
The pressure-of-flotation apparatus for density comparison has been improved in temperature control. A new method for density and thickness measurements of a thin-film is proposed by a pressure-of-flotation method (PFM). The density and thickness of a molybdenum thin-film prepared on a silicon substrate by a sputtering technique are evaluated by measuring the density and mass differences of a silicon substrate with and without the thin-film. The estimated density of the molybdenum film is (7890/spl plusmn/300) kg/m/sup 3/, which is smaller than that of bulk molybdenum. The average thickness of the thin-film is calculated to be (12.08 /spl plusmn/ 0.49) nm. Details on the density and thickness measurement of a thin-film and the results of the measurement are presented.
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Waseda A., Fujii K., Taketoshi N. Density Measurement of a Thin-Film by the Pressure-of-Flotation Method // IEEE Transactions on Instrumentation and Measurement. 2005. Vol. 54. No. 2. pp. 882-885.
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Waseda A., Fujii K., Taketoshi N. Density Measurement of a Thin-Film by the Pressure-of-Flotation Method // IEEE Transactions on Instrumentation and Measurement. 2005. Vol. 54. No. 2. pp. 882-885.
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TY - JOUR
DO - 10.1109/tim.2005.843523
UR - https://doi.org/10.1109/tim.2005.843523
TI - Density Measurement of a Thin-Film by the Pressure-of-Flotation Method
T2 - IEEE Transactions on Instrumentation and Measurement
AU - Waseda, A.
AU - Fujii, K.
AU - Taketoshi, N
PY - 2005
DA - 2005/04/01
PB - Institute of Electrical and Electronics Engineers (IEEE)
SP - 882-885
IS - 2
VL - 54
SN - 0018-9456
SN - 1557-9662
ER -
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@article{2005_Waseda,
author = {A. Waseda and K. Fujii and N Taketoshi},
title = {Density Measurement of a Thin-Film by the Pressure-of-Flotation Method},
journal = {IEEE Transactions on Instrumentation and Measurement},
year = {2005},
volume = {54},
publisher = {Institute of Electrical and Electronics Engineers (IEEE)},
month = {apr},
url = {https://doi.org/10.1109/tim.2005.843523},
number = {2},
pages = {882--885},
doi = {10.1109/tim.2005.843523}
}
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Waseda, A., et al. “Density Measurement of a Thin-Film by the Pressure-of-Flotation Method.” IEEE Transactions on Instrumentation and Measurement, vol. 54, no. 2, Apr. 2005, pp. 882-885. https://doi.org/10.1109/tim.2005.843523.