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Proceedings of SPIE - The International Society for Optical Engineering

320x240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging

Tara Martin 1
Peter Dixon 1
Mari Anne Gagliardi 1
Navneet Masaun 1
1
 
Sensors Unlimited Inc. (United States)
Publication typeProceedings Article
Publication date2005-04-07
Quartile SCImago
Quartile WOS
Impact factor
ISSN0277786X, 1996756X
Abstract
We report on the recent production release of our 320x240 pixel InGaAs/InP focal plane array and camera for visible and short-wavelength infrared light imaging. For this camera, we have fabricated a substrate-removed backside-illuminated InGaAs/InP photodiode array hybridized to a silicon read out integrated circuit (ROIC). Removing the InP substrate from the focal plane array allows visible wavelengths, which would otherwise be absorbed by the InP substrate due to its 920 nm wavelength cut-off, to reach the pixels’ active region. Quantum efficiency is approximately 15% at 500 nm, 70% at 850 nm, 85% at 1310 nm and 80% at 1550 nm. This focal plane array is useable for visible imaging as well as imaging eye-safe lasers and is of particular interest for day and low light level imaging as well as hyperspectral imaging.

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GOST Copy
Martin T. et al. 320x240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging // Proceedings of SPIE - The International Society for Optical Engineering. 2005.
GOST all authors (up to 50) Copy
Martin T., Dixon P., Gagliardi M. A., Masaun N. 320x240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging // Proceedings of SPIE - The International Society for Optical Engineering. 2005.
RIS |
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RIS Copy
TY - CPAPER
DO - 10.1117/12.596409
UR - https://doi.org/10.1117/12.596409
TI - 320x240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging
T2 - Proceedings of SPIE - The International Society for Optical Engineering
AU - Martin, Tara
AU - Dixon, Peter
AU - Gagliardi, Mari Anne
AU - Masaun, Navneet
PY - 2005
DA - 2005/04/07 00:00:00
PB - SPIE
SN - 0277-786X
SN - 1996-756X
ER -
BibTex
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BibTex Copy
@inproceedings{2005_Martin,
author = {Tara Martin and Peter Dixon and Mari Anne Gagliardi and Navneet Masaun},
title = {320x240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging},
year = {2005},
month = {apr},
publisher = {SPIE}
}
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