Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films
D. A. Kiselev
1
,
R N Zhukov
1
,
A S Bykov
1
,
M.I Voronova
1
,
K. D. Shcherbachev
1
,
M D Malinkovich
1
,
Yu. N. Parkhomenko
1
Publication type: Journal Article
Publication date: 2014-03-18
scimago Q4
wos Q4
SJR: 0.183
CiteScore: 1.3
Impact factor: 0.7
ISSN: 00201685, 16083172
Materials Chemistry
Metals and Alloys
Inorganic Chemistry
General Chemical Engineering
Abstract
We have studied the formation of thin textured LiNbO3 films in originally amorphous samples produced by rf magnetron sputtering of a single-crystal target on silicon substrates containing a native oxide layer. The results demonstrate that postgrowth annealing leads to the formation of two phases, LiNbO3 and LiNb3O8, and that the percentage of the nonferroelectric phase LiNb3O8 is minimal after annealing at a temperature of 700°C. Annealing at 700°C is optimal because it ensures the lowest surface roughness of the film, the highest degree of structuring of the ferroelectric phase, and the maximum contrasts corresponding to the vertical and lateral components of the ferroelectric polarization in piezoresponse force microscopy.
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21
Total citations:
21
Citations from 2025:
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The most citing journal
Citations in journal:
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GOST
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Kiselev D. A. et al. Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films // Inorganic Materials. 2014. Vol. 50. No. 4. pp. 419-422.
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Kiselev D. A., Zhukov R. N., Bykov A. S., Voronova M., Shcherbachev K. D., Malinkovich M. D., Parkhomenko Y. N. Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films // Inorganic Materials. 2014. Vol. 50. No. 4. pp. 419-422.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1134/S0020168514040074
UR - https://doi.org/10.1134/S0020168514040074
TI - Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films
T2 - Inorganic Materials
AU - Kiselev, D. A.
AU - Zhukov, R N
AU - Bykov, A S
AU - Voronova, M.I
AU - Shcherbachev, K. D.
AU - Malinkovich, M D
AU - Parkhomenko, Yu. N.
PY - 2014
DA - 2014/03/18
PB - Pleiades Publishing
SP - 419-422
IS - 4
VL - 50
SN - 0020-1685
SN - 1608-3172
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2014_Kiselev,
author = {D. A. Kiselev and R N Zhukov and A S Bykov and M.I Voronova and K. D. Shcherbachev and M D Malinkovich and Yu. N. Parkhomenko},
title = {Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films},
journal = {Inorganic Materials},
year = {2014},
volume = {50},
publisher = {Pleiades Publishing},
month = {mar},
url = {https://doi.org/10.1134/S0020168514040074},
number = {4},
pages = {419--422},
doi = {10.1134/S0020168514040074}
}
Cite this
MLA
Copy
Kiselev, D. A., et al. “Effect of annealing on the structure and phase composition of thin electro-optical lithium niobate films.” Inorganic Materials, vol. 50, no. 4, Mar. 2014, pp. 419-422. https://doi.org/10.1134/S0020168514040074.
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