A model for calculating the composition of GaAsx P1–x solid solutions under metalorganic vapor phase epitaxy conditions
A D Maksimov
1
,
V Yu Eistrikh Geller
1
,
A.A. Marmalyuk
2
,
M A Ladugin
2
,
T A Bagaev
2
,
P V Gorlachuk
2
,
I V Yarotskaya
2
2
AO Stel’makh Polyus Research Institute, Moscow, Russia
|
Publication type: Journal Article
Publication date: 2017-04-01
scimago Q4
wos Q4
SJR: 0.183
CiteScore: 1.3
Impact factor: 0.7
ISSN: 00201685, 16083172
Materials Chemistry
Metals and Alloys
Inorganic Chemistry
General Chemical Engineering
Abstract
A model is proposed for calculating the composition of GaAs x P1–x solid solutions, based on the iterative determination of the equilibrium partial pressures of the pyrolysis products of the starting reagents, followed by calculation of the composition of the solid solution in an adsorption–desorption model. The proposed model ensures good agreement between calculation results and experimental data.
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Maksimov A. D. et al. A model for calculating the composition of GaAsxP1–x solid solutions under metalorganic vapor phase epitaxy conditions // Inorganic Materials. 2017. Vol. 53. No. 4. pp. 369-375.
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Maksimov A. D., Eistrikh Geller V. Yu., Marmalyuk A., Ladugin M. A., Bagaev T. A., Gorlachuk P. V., Yarotskaya I. V. A model for calculating the composition of GaAsxP1–x solid solutions under metalorganic vapor phase epitaxy conditions // Inorganic Materials. 2017. Vol. 53. No. 4. pp. 369-375.
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TY - JOUR
DO - 10.1134/S0020168517040124
UR - https://doi.org/10.1134/S0020168517040124
TI - A model for calculating the composition of GaAsxP1–x solid solutions under metalorganic vapor phase epitaxy conditions
T2 - Inorganic Materials
AU - Maksimov, A D
AU - Eistrikh Geller, V Yu
AU - Marmalyuk, A.A.
AU - Ladugin, M A
AU - Bagaev, T A
AU - Gorlachuk, P V
AU - Yarotskaya, I V
PY - 2017
DA - 2017/04/01
PB - Pleiades Publishing
SP - 369-375
IS - 4
VL - 53
SN - 0020-1685
SN - 1608-3172
ER -
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BibTex (up to 50 authors)
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@article{2017_Maksimov,
author = {A D Maksimov and V Yu Eistrikh Geller and A.A. Marmalyuk and M A Ladugin and T A Bagaev and P V Gorlachuk and I V Yarotskaya},
title = {A model for calculating the composition of GaAsxP1–x solid solutions under metalorganic vapor phase epitaxy conditions},
journal = {Inorganic Materials},
year = {2017},
volume = {53},
publisher = {Pleiades Publishing},
month = {apr},
url = {https://doi.org/10.1134/S0020168517040124},
number = {4},
pages = {369--375},
doi = {10.1134/S0020168517040124}
}
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MLA
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Maksimov, A. D., et al. “A model for calculating the composition of GaAsxP1–x solid solutions under metalorganic vapor phase epitaxy conditions.” Inorganic Materials, vol. 53, no. 4, Apr. 2017, pp. 369-375. https://doi.org/10.1134/S0020168517040124.