Pleiades Publishing
Inorganic Materials
,  том 58 ,  издание 4 ,  страницы 425-432

Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAs xP1 –x Metalorganic Vapor Phase Epitaxy

Тип публикации: Journal Article
Дата публикации: 2022-04-01
Pleiades Publishing
scimago Q4
wos Q4
БС2
SJR: 0.183
CiteScore: 1.3
Impact factor: 0.7
ISSN: 00201685, 16083172
Materials Chemistry
Metals and Alloys
Inorganic Chemistry
General Chemical Engineering
Краткое описание
Density functional theory calculations have been used to determine the adsorption and desorption potentials of pyrolysis products on the substrate in the GaAsxP1 – x/GaAs metalorganic vapor phase epitaxy process. The results have been used in kinetic Monte Carlo simulation of the behavior of the pyrolysis products on the growth surface, with allowance for adsorption, desorption, and diffusion. The simulation results agree well with experimental data. The proposed calculation algorithm can be used to study the adsorption–desorption behavior of materials in other systems.
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Maksimov A. D. et al. Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAs xP1 –x Metalorganic Vapor Phase Epitaxy // Inorganic Materials. 2022. Vol. 58. No. 4. pp. 425-432.
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Maksimov A. D., Davydkin M. A., Bagaev T. A., Andreev A., Yarotskaya I. V., Ladugin M. A., Marmalyuk A. Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAs xP1 –x Metalorganic Vapor Phase Epitaxy // Inorganic Materials. 2022. Vol. 58. No. 4. pp. 425-432.
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TY - JOUR
DO - 10.1134/S0020168522040112
UR - https://doi.org/10.1134/S0020168522040112
TI - Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAs xP1 –x Metalorganic Vapor Phase Epitaxy
T2 - Inorganic Materials
AU - Maksimov, A D
AU - Davydkin, M A
AU - Bagaev, T A
AU - Andreev, A.Yu.
AU - Yarotskaya, I V
AU - Ladugin, M A
AU - Marmalyuk, A.A.
PY - 2022
DA - 2022/04/01
PB - Pleiades Publishing
SP - 425-432
IS - 4
VL - 58
SN - 0020-1685
SN - 1608-3172
ER -
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@article{2022_Maksimov,
author = {A D Maksimov and M A Davydkin and T A Bagaev and A.Yu. Andreev and I V Yarotskaya and M A Ladugin and A.A. Marmalyuk},
title = {Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAs xP1 –x Metalorganic Vapor Phase Epitaxy},
journal = {Inorganic Materials},
year = {2022},
volume = {58},
publisher = {Pleiades Publishing},
month = {apr},
url = {https://doi.org/10.1134/S0020168522040112},
number = {4},
pages = {425--432},
doi = {10.1134/S0020168522040112}
}
MLA
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Maksimov, A. D., et al. “Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAs xP1 –x Metalorganic Vapor Phase Epitaxy.” Inorganic Materials, vol. 58, no. 4, Apr. 2022, pp. 425-432. https://doi.org/10.1134/S0020168522040112.