High Quality Factor Mechanical Resonance in a Silicon Nanowire
D E Presnov
1, 2
,
S G Kafanov
3
,
A. A. Dorofeev
1
,
I V Bozhev
1
,
A.S. Trifonov
1, 2
,
YU. A. PASHKIN
3, 4
,
V. A. Krupenin
1
Publication type: Journal Article
Publication date: 2018-10-11
scimago Q3
wos Q3
SJR: 0.312
CiteScore: 2.3
Impact factor: 1.3
ISSN: 00213640, 10906487
Physics and Astronomy (miscellaneous)
Abstract
Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of 20 mK for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler–Bernoulli theory. The measured internal quality factor of the 5 μm-long resonator, 3.62 × 104, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity ~6 × 10−20 g Hz–1/2.
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9
Total citations:
9
Citations from 2024:
1
(11%)
The most citing journal
Citations in journal:
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GOST
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Presnov D. E. et al. High Quality Factor Mechanical Resonance in a Silicon Nanowire // JETP Letters. 2018. Vol. 108. No. 7. pp. 492-497.
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Presnov D. E., Kafanov S. G., Dorofeev A. A., Bozhev I. V., Trifonov A., PASHKIN Y. A., Krupenin V. A. High Quality Factor Mechanical Resonance in a Silicon Nanowire // JETP Letters. 2018. Vol. 108. No. 7. pp. 492-497.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1134/S0021364018190037
UR - https://doi.org/10.1134/S0021364018190037
TI - High Quality Factor Mechanical Resonance in a Silicon Nanowire
T2 - JETP Letters
AU - Presnov, D E
AU - Kafanov, S G
AU - Dorofeev, A. A.
AU - Bozhev, I V
AU - Trifonov, A.S.
AU - PASHKIN, YU. A.
AU - Krupenin, V. A.
PY - 2018
DA - 2018/10/11
PB - Pleiades Publishing
SP - 492-497
IS - 7
VL - 108
SN - 0021-3640
SN - 1090-6487
ER -
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BibTex (up to 50 authors)
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@article{2018_Presnov,
author = {D E Presnov and S G Kafanov and A. A. Dorofeev and I V Bozhev and A.S. Trifonov and YU. A. PASHKIN and V. A. Krupenin},
title = {High Quality Factor Mechanical Resonance in a Silicon Nanowire},
journal = {JETP Letters},
year = {2018},
volume = {108},
publisher = {Pleiades Publishing},
month = {oct},
url = {https://doi.org/10.1134/S0021364018190037},
number = {7},
pages = {492--497},
doi = {10.1134/S0021364018190037}
}
Cite this
MLA
Copy
Presnov, D. E., et al. “High Quality Factor Mechanical Resonance in a Silicon Nanowire.” JETP Letters, vol. 108, no. 7, Oct. 2018, pp. 492-497. https://doi.org/10.1134/S0021364018190037.
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