Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition

Publication type: Journal Article
Publication date: 2020-02-01
Pleiades Publishing
scimago Q4
wos Q4
SJR: 0.145
CiteScore: 0.9
Impact factor: 0.9
ISSN: 0030400X, 15626911
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Abstract
The possibility of using electroluminescence to study Si–Ta2O5 and Si–SiO2–Ta2O5 structures and obtain information on the electronic structure of the Ta2O5 layer and on the properties of the SiO2–Ta2O5 interface is shows. A model of the electronic structure of the Ta2O5 layer formed by molecular layer deposition is proposed, which explains the spectral distribution of luminescence independently of the method of its excitation. It is shown that the formation of a Ta2O5 layer on the surface of thermally oxidized silicon is accompanied by transformation in the near-surface SiO2 layer and by quenching of the luminescence band in the spectral region of 650 nm.
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Baraban A. P. et al. Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition // Optics and Spectroscopy (English translation of Optika i Spektroskopiya). 2020. Vol. 128. No. 2. pp. 220-223.
GOST all authors (up to 50) Copy
Baraban A. P., Dmitriev V., Drozd V. E., PETROV Y. V., PROKOF'EV V. A. Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition // Optics and Spectroscopy (English translation of Optika i Spektroskopiya). 2020. Vol. 128. No. 2. pp. 220-223.
RIS |
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TY - JOUR
DO - 10.1134/S0030400X20020046
UR - https://doi.org/10.1134/S0030400X20020046
TI - Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition
T2 - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)
AU - Baraban, A P
AU - Dmitriev, V.A.
AU - Drozd, V E
AU - PETROV, YU. V.
AU - PROKOF'EV, V. A.
PY - 2020
DA - 2020/02/01
PB - Pleiades Publishing
SP - 220-223
IS - 2
VL - 128
SN - 0030-400X
SN - 1562-6911
ER -
BibTex |
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BibTex (up to 50 authors) Copy
@article{2020_Baraban,
author = {A P Baraban and V.A. Dmitriev and V E Drozd and YU. V. PETROV and V. A. PROKOF'EV},
title = {Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition},
journal = {Optics and Spectroscopy (English translation of Optika i Spektroskopiya)},
year = {2020},
volume = {128},
publisher = {Pleiades Publishing},
month = {feb},
url = {https://doi.org/10.1134/S0030400X20020046},
number = {2},
pages = {220--223},
doi = {10.1134/S0030400X20020046}
}
MLA
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MLA Copy
Baraban, A. P., et al. “Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition.” Optics and Spectroscopy (English translation of Optika i Spektroskopiya), vol. 128, no. 2, Feb. 2020, pp. 220-223. https://doi.org/10.1134/S0030400X20020046.