Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy
Тип публикации: Journal Article
Дата публикации: 2015-01-01
scimago Q4
wos Q4
БС4
SJR: 0.165
CiteScore: 0.8
Impact factor: 0.4
ISSN: 10274510, 18197094
Surfaces, Coatings and Films
Краткое описание
Data for the study of various contrasts in the methods of scanning electron and ion microscopy with the energy filtration of signals from secondary and reflected electrons are presented. A model of the formation of contrast by secondary electrons in a helium scanning electron microscope is formulated. The possibility of contrast amplification via energy filtration in a helium ion microscope as well as the chance of recording reflected ions by means of secondary electron detection is demonstrated. The recorded data for the material contrast in low-voltage electron microscopy at various acceleration voltages and different modes of energy filtration are given. The possibility of enhancing or reducing material contrast by means of energy filtration is shown.
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Mikhailovskii V. Y., PETROV Y. V., Vyvenko O. F. Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy // Journal of Surface Investigation. 2015. Vol. 9. No. 1. pp. 196-202.
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Mikhailovskii V. Y., PETROV Y. V., Vyvenko O. F. Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy // Journal of Surface Investigation. 2015. Vol. 9. No. 1. pp. 196-202.
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TY - JOUR
DO - 10.1134/S1027451014060378
UR - https://doi.org/10.1134/S1027451014060378
TI - Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy
T2 - Journal of Surface Investigation
AU - Mikhailovskii, V. Yu.
AU - PETROV, YU. V.
AU - Vyvenko, O F
PY - 2015
DA - 2015/01/01
PB - Pleiades Publishing
SP - 196-202
IS - 1
VL - 9
SN - 1027-4510
SN - 1819-7094
ER -
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@article{2015_Mikhailovskii,
author = {V. Yu. Mikhailovskii and YU. V. PETROV and O F Vyvenko},
title = {Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy},
journal = {Journal of Surface Investigation},
year = {2015},
volume = {9},
publisher = {Pleiades Publishing},
month = {jan},
url = {https://doi.org/10.1134/S1027451014060378},
number = {1},
pages = {196--202},
doi = {10.1134/S1027451014060378}
}
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MLA
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Mikhailovskii, V. Yu., et al. “Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy.” Journal of Surface Investigation, vol. 9, no. 1, Jan. 2015, pp. 196-202. https://doi.org/10.1134/S1027451014060378.