Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL
Publication type: Journal Article
Publication date: 2022-07-12
scimago Q4
SJR: 0.194
CiteScore: 0.8
Impact factor: —
ISSN: 10637397, 16083415
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
The results of the research and analysis of wave acoustic processes in piezoelectric substrates based on the solution of wave equations of piezoacoustics by the finite element method are presented. A description of the test structures and the algorithm of the work in the COMSOL Multiphysics environment are given. Three main approaches are considered: in the region of eigenfrequencies, in the given frequency range, and in the time domain. The properties and parameters of widely used surface acoustic waves are analyzed. The visualization of a number of characteristics is presented. The phase velocity of the wave and the electromechanical coupling coefficient are calculated. It is shown that the data obtained as a result of numerical analysis correspond to the data from known sources. The results of the calculation and experimental measurements of the transmission coefficient are compared using the example of a delay line and a resonator filter.
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7
Total citations:
7
Citations from 2024:
6
(85.72%)
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GOST
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Koigerov A. S., Korlyakov A. V. Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL // Russian Microelectronics. 2022. Vol. 51. No. 4. pp. 226-235.
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Koigerov A. S., Korlyakov A. V. Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL // Russian Microelectronics. 2022. Vol. 51. No. 4. pp. 226-235.
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RIS
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TY - JOUR
DO - 10.1134/s1063739722040072
UR - https://doi.org/10.1134/s1063739722040072
TI - Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL
T2 - Russian Microelectronics
AU - Koigerov, A S
AU - Korlyakov, A V
PY - 2022
DA - 2022/07/12
PB - Pleiades Publishing
SP - 226-235
IS - 4
VL - 51
SN - 1063-7397
SN - 1608-3415
ER -
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BibTex (up to 50 authors)
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@article{2022_Koigerov,
author = {A S Koigerov and A V Korlyakov},
title = {Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL},
journal = {Russian Microelectronics},
year = {2022},
volume = {51},
publisher = {Pleiades Publishing},
month = {jul},
url = {https://doi.org/10.1134/s1063739722040072},
number = {4},
pages = {226--235},
doi = {10.1134/s1063739722040072}
}
Cite this
MLA
Copy
Koigerov, A. S., and A V Korlyakov. “Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL.” Russian Microelectronics, vol. 51, no. 4, Jul. 2022, pp. 226-235. https://doi.org/10.1134/s1063739722040072.