Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate
R N Zhukov
1
,
D. A. Kiselev
1
,
T S Ilina
1
,
A A Temirov
1
,
I. V. Kubasov
1
,
A S Bykov
1
,
M D Malinkovich
1
,
Yu. N. Parkhomenko
1
,
Publication type: Journal Article
Publication date: 2018-09-01
scimago Q3
SJR: 0.253
CiteScore: 1.1
Impact factor: —
ISSN: 10628738, 19349432
General Physics and Astronomy
Abstract
the microstructure, value of self-polarization, and local piezoelectric hysteresis loops of LiNbO3 thin films synthesized on silicon substrates with a native SiOx layer and with a platinum layer are compared via scanning probe microscopy. It is found that smoother surfaces, smaller grain sizes, and a simultaneous higher self-polarization value and effective piezoelectric coefficient are typical of LiNbO3 films applied to a silicon substrate with a platinum sublayer.
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Zhukov R. N. et al. Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate // Bulletin of the Russian Academy of Sciences: Physics. 2018. Vol. 82. No. 9. pp. 1232-1235.
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Zhukov R. N., Kiselev D. A., Ilina T. S., Temirov A. A., Kubasov I. V., Bykov A. S., Malinkovich M. D., Parkhomenko Y. N., Savchenko A. G. Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate // Bulletin of the Russian Academy of Sciences: Physics. 2018. Vol. 82. No. 9. pp. 1232-1235.
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TY - JOUR
DO - 10.3103/S1062873818090265
UR - http://link.springer.com/10.3103/S1062873818090265
TI - Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate
T2 - Bulletin of the Russian Academy of Sciences: Physics
AU - Zhukov, R N
AU - Kiselev, D. A.
AU - Ilina, T S
AU - Temirov, A A
AU - Kubasov, I. V.
AU - Bykov, A S
AU - Malinkovich, M D
AU - Parkhomenko, Yu. N.
AU - Savchenko, A G
PY - 2018
DA - 2018/09/01
PB - Allerton Press
SP - 1232-1235
IS - 9
VL - 82
SN - 1062-8738
SN - 1934-9432
ER -
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BibTex (up to 50 authors)
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@article{2018_Zhukov,
author = {R N Zhukov and D. A. Kiselev and T S Ilina and A A Temirov and I. V. Kubasov and A S Bykov and M D Malinkovich and Yu. N. Parkhomenko and A G Savchenko},
title = {Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate},
journal = {Bulletin of the Russian Academy of Sciences: Physics},
year = {2018},
volume = {82},
publisher = {Allerton Press},
month = {sep},
url = {http://link.springer.com/10.3103/S1062873818090265},
number = {9},
pages = {1232--1235},
doi = {10.3103/S1062873818090265}
}
Cite this
MLA
Copy
Zhukov, R. N., et al. “Effect of a Platinum Sublayer on the Microstructure and Spontaneous Polarization of Thin Lithium Niobate Films Deposited on a Silicon Substrate.” Bulletin of the Russian Academy of Sciences: Physics, vol. 82, no. 9, Sep. 2018, pp. 1232-1235. http://link.springer.com/10.3103/S1062873818090265.