Open Access
Sensors, volume 20, issue 17, pages 4927
Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
Xin Cheng
1
,
Jitendra Dash
1
,
Dinusha Serandi Gunawardena
1
,
Lin Htein
1
,
Hwa-Yaw Tam
1
Publication type: Journal Article
Publication date: 2020-08-31
PubMed ID:
32878217
Biochemistry
Analytical Chemistry
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering
Instrumentation
Abstract
A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C.
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