Investigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy
Publication type: Journal Article
Publication date: 2020-02-26
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ISSN: 21692491, 21692505
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Abdel-Motaleb I. M. Investigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy // Crystal Structure Theory and Applications. 2020. Vol. 09. No. 01. pp. 1-11.
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Abdel-Motaleb I. M. Investigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy // Crystal Structure Theory and Applications. 2020. Vol. 09. No. 01. pp. 1-11.
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RIS
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TY - JOUR
DO - 10.4236/csta.2020.91001
UR - https://doi.org/10.4236/csta.2020.91001
TI - Investigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy
T2 - Crystal Structure Theory and Applications
AU - Abdel-Motaleb, I M
PY - 2020
DA - 2020/02/26
PB - Scientific Research Publishing
SP - 1-11
IS - 01
VL - 09
SN - 2169-2491
SN - 2169-2505
ER -
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BibTex (up to 50 authors)
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@article{2020_Abdel-Motaleb,
author = {I M Abdel-Motaleb},
title = {Investigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy},
journal = {Crystal Structure Theory and Applications},
year = {2020},
volume = {09},
publisher = {Scientific Research Publishing},
month = {feb},
url = {https://doi.org/10.4236/csta.2020.91001},
number = {01},
pages = {1--11},
doi = {10.4236/csta.2020.91001}
}
Cite this
MLA
Copy
Abdel-Motaleb, I. M.. “Investigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy.” Crystal Structure Theory and Applications, vol. 09, no. 01, Feb. 2020, pp. 1-11. https://doi.org/10.4236/csta.2020.91001.