ADVANCES IN APPLIED PHYSICS
,  volume 9 ,  issue 6 ,  pages 523-532

Ensuring uniform thickness of the conductive coating on the inner surface of the hemispherical resonator by magnetron sputtering

Vladimir Kondratenko 1
, 
Gaik Sagatelyan 2
, 
Andrey Shishlov 3
, 
Mikhail Bilinkin 3
1
 
2
 
3
 
Kuznetsov research institute of applied mechanics | 
Publication type: Journal Article
Publication date: 2021-12-24
SJR: —
CiteScore: —
Impact factor: —
ISSN: 23074469, 13147617, 23675632
Abstract

The possibilities of technological ensuring of the uniformity of thickness distribution of a thin-film metal coating produced by magnetron sputtering on the inner surface of a thinwalled silica resonator made in the shape of a hemisphere are considered. The possibility of minimizing the thickness of the coating by optimizing the diameter of the annular magnetron emission zone in combination with the distance from the resonator to the target made of sprayed material is shown. A further increase in the evenness of thickness of the coating is possible on the basis of the use of a fixed screen with a hole, the shape and location of which are calculated analytically, and the final configuration of the contour is specified empirically

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Kondratenko V. et al. Ensuring uniform thickness of the conductive coating on the inner surface of the hemispherical resonator by magnetron sputtering // ADVANCES IN APPLIED PHYSICS. 2021. Vol. 9. No. 6. pp. 523-532.
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Kondratenko V., Sagatelyan G., Shishlov A., Bilinkin M. Ensuring uniform thickness of the conductive coating on the inner surface of the hemispherical resonator by magnetron sputtering // ADVANCES IN APPLIED PHYSICS. 2021. Vol. 9. No. 6. pp. 523-532.
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TY - JOUR
DO - 10.51368/2307-4469-2021-9-6-523-532
UR - https://doi.org/10.51368/2307-4469-2021-9-6-523-532
TI - Ensuring uniform thickness of the conductive coating on the inner surface of the hemispherical resonator by magnetron sputtering
T2 - ADVANCES IN APPLIED PHYSICS
AU - Kondratenko, Vladimir
AU - Sagatelyan, Gaik
AU - Shishlov, Andrey
AU - Bilinkin, Mikhail
PY - 2021
DA - 2021/12/24
PB - Joint-Stock Company Scientific and Production Association - ORION
SP - 523-532
IS - 6
VL - 9
SN - 2307-4469
SN - 1314-7617
SN - 2367-5632
ER -
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@article{2021_Kondratenko,
author = {Vladimir Kondratenko and Gaik Sagatelyan and Andrey Shishlov and Mikhail Bilinkin},
title = {Ensuring uniform thickness of the conductive coating on the inner surface of the hemispherical resonator by magnetron sputtering},
journal = {ADVANCES IN APPLIED PHYSICS},
year = {2021},
volume = {9},
publisher = {Joint-Stock Company Scientific and Production Association - ORION},
month = {dec},
url = {https://doi.org/10.51368/2307-4469-2021-9-6-523-532},
number = {6},
pages = {523--532},
doi = {10.51368/2307-4469-2021-9-6-523-532}
}
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Kondratenko, Vladimir, et al. “Ensuring uniform thickness of the conductive coating on the inner surface of the hemispherical resonator by magnetron sputtering.” ADVANCES IN APPLIED PHYSICS, vol. 9, no. 6, Dec. 2021, pp. 523-532. https://doi.org/10.51368/2307-4469-2021-9-6-523-532.