The recent progress of the semiconductor silicon technology (a review)
Publication type: Journal Article
Publication date: 2022-03-10
SJR: —
CiteScore: —
Impact factor: —
ISSN: 23074469, 13147617, 23675632
Are you a researcher?
Create a profile to get free access to personal recommendations for colleagues and new articles.
Metrics
0
Total citations:
0
Cite this
GOST |
RIS |
BibTex |
MLA
Cite this
GOST
Copy
Naumov A., Orekhov D., Kulchitsky N. The recent progress of the semiconductor silicon technology (a review) // ADVANCES IN APPLIED PHYSICS. 2022. Vol. 10. No. 1. pp. 34-52.
GOST all authors (up to 50)
Copy
Naumov A., Orekhov D., Kulchitsky N. The recent progress of the semiconductor silicon technology (a review) // ADVANCES IN APPLIED PHYSICS. 2022. Vol. 10. No. 1. pp. 34-52.
Cite this
RIS
Copy
TY - JOUR
DO - 10.51368/2307-4469-2022-10-1-34-52
UR - https://doi.org/10.51368/2307-4469-2022-10-1-34-52
TI - The recent progress of the semiconductor silicon technology (a review)
T2 - ADVANCES IN APPLIED PHYSICS
AU - Naumov, A
AU - Orekhov, D
AU - Kulchitsky, N
PY - 2022
DA - 2022/03/10
PB - Joint-Stock Company Scientific and Production Association - ORION
SP - 34-52
IS - 1
VL - 10
SN - 2307-4469
SN - 1314-7617
SN - 2367-5632
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2022_Naumov,
author = {A Naumov and D Orekhov and N Kulchitsky},
title = {The recent progress of the semiconductor silicon technology (a review)},
journal = {ADVANCES IN APPLIED PHYSICS},
year = {2022},
volume = {10},
publisher = {Joint-Stock Company Scientific and Production Association - ORION},
month = {mar},
url = {https://doi.org/10.51368/2307-4469-2022-10-1-34-52},
number = {1},
pages = {34--52},
doi = {10.51368/2307-4469-2022-10-1-34-52}
}
Cite this
MLA
Copy
Naumov, A., et al. “The recent progress of the semiconductor silicon technology (a review).” ADVANCES IN APPLIED PHYSICS, vol. 10, no. 1, Mar. 2022, pp. 34-52. https://doi.org/10.51368/2307-4469-2022-10-1-34-52.